@article{103811, author = {M Wagner and K Lenghaus and John Gillen and Michael Tarlov}, title = {Characterization and Ion-Induced Degradation of Cross-Linked Poly(Methyl Methacylate) Studies Using Time of Flight Secondary Ion Mass Spectrometry}, year = {2006}, number = {253}, month = {2006-12-30}, publisher = {Applied Surface Science}, language = {en}, }