@conference{103801,
  author = {Jun-Feng Song and F Rudder and Theodore Vorburger and A Hartman and Brian Scace and J Smith},
  title = {Microform Calibrations in Surface Metrology},
  year = {1994},
  month = {1994-01-01},
  publisher = {Proceedings of the 6th International Conference on Metrology and Properties of Engineering Surfaces, Birmingham, -1},
  language = {en},
}