@article{10346,
  author = {Brent Sperling and John Hoang and William Kimes and James Maslar and Kristen and Nhan Nguyen},
  title = {Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water},
  year = {2014},
  number = {32},
  month = {2014-04-23},
  publisher = {Journal of Vacuum Science and Technology A},
  doi = {https://doi.org/10.1116/1.4872166},
  language = {en},
}