@article{10341,
  author = {Brent Sperling and William Kimes and James Maslar},
  title = {Quantitative infrared spectroscopy of tetrakis(dimethylamido)titanium for process measurements},
  year = {2014},
  number = {3},
  month = {2014-01-07},
  publisher = {Journal of the Electrochemical Society},
  doi = {https://doi.org/10.1149/2.009403jss},
  language = {en},
}