@article{10336,
  author = {Brent Sperling and John Hoang and William Kimes and James Maslar},
  title = {Time-resolved surface infrared spectroscopy during atomic layer deposition},
  year = {2013},
  number = {67},
  month = {2013-09-10},
  publisher = {Applied Spectroscopy},
  doi = {https://doi.org/10.1366/13-06995},
  language = {en},
}