@article{10331, author = {Brent Sperling and William Kimes and James Maslar and Pamela Chu}, title = {Time-resolved Fourier Transform Infrared Spectroscopy of the Gas-phase During Atomic Layer Deposition}, year = {2010}, number = {28}, month = {2010-06-24}, publisher = {Journal of Vacuum Science and Technology A}, doi = {https://doi.org/10.1116/1.3455187}, language = {en}, }