@article{10326,
  author = {Brent Sperling and William Kimes and James Maslar},
  title = {Reflection Absorption Infrared Spectroscopy During Atomic Layer Deposition of HfO2 Films From Tetrakis (ethylmethylamido) Hafnium and Water},
  year = {2010},
  number = {256},
  month = {2010-06-01},
  publisher = {Applied Surface Science},
  doi = {https://doi.org/10.1016/j.apsusc.2010.03.050},
  language = {en},
}