@article{102916,
  author = {John Gillen and J Phelps and Randall Nelson and Peter Williams and Steven Hues},
  title = {Secondary Ion Yield Matrix Effects in SIMS Depth Profiles of Si/Ge Multilayers},
  year = {1989},
  number = {14},
  month = {1989-04-01},
  publisher = {Surface and Interface Analysis},
  language = {en},
}