TY - JOUR AU - Katzenmeyer, Aaron AU - Titze, Michael AU - Frisone, Sam AU - Ohlhausen, Tony AU - Flores, Anthony AU - Campbell, Deanna AU - Li, Bingjun AU - Wang, Yongqiang AU - Han, Jung AU - Bielejec, Edward AU - Goldman, Rachel C2 - AIP Advances DA - 2024-04-18 04:04:00 DO - https://doi.org/10.1063/5.0198791 LA - en M1 - 14 PB - AIP Advances PY - 2024 TI - Comparison of Mg-based liquid metal ion sources for scalable focused-ion-implantation doping of GaN UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957347 ER -