@article{1239716,
  author = {Nathan Nakamura and Paul Szypryt and Joseph Fowler and Zachary H. Levine and Daniel Swetz},
  title = {Nanoscale X-ray Tomography of Integrated Circuits using a Hybrid Electron/X-ray Microscope: Results and Prospects},
  year = {2023},
  month = {2023-11-20 05:11:00},
  publisher = {IEEE Xplore Digital Library},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956624},
  language = {en},
}