3-D X-ray Imaging of Nanosized Circuits

Andrew Kalukin


X-ray nanotomography is a novel technique for device analysis. It uses x-ray measurements to build three-dimensional images of the x-ray opacity inside an object, making it possible to generate high-resolution spatial maps of multilayered circuits. Tomography has the capacity to image individual elements within an object; it is therefore particularly well-suited for imaging buried metallic lines in multilayer structures. Our objective is to demonstrate a new technology for submicron tomography based on computational techniques developed by us and recent optical advancements in x-ray optics.