Brett Baker, Thomas Moffat, Daniel Josell and
Daniel Wheeler
National Institute of Standards and Technology
Gaithersburg, MD 20899
Successful superfilling of lines and vias will be shown with a commercial,
silver-cyanide electrolyte. Hysteretic i-V behavior and chronoamperometric
transients on planar electrodes are used to extract parameters that quantify
the kinetics of the deposition process. These parameters are used in the
curvature accelerator coverage (CEAC) model to quantitatively predict filling
of features on patterned substrates. The fundamental premise of the CEAC
model is that area reduction at the bottoms of filling features leads to
increased local coverage of adsorbed catalyst and thus local deposition
rate. It has previously been shown to accurately predict superconformal
copper electrodeposition for sulfate-based electrolytes with thiols as
catalysts. This work examines the model's generality through application
to a cyanide-based electrolyte and selenium catalyst.