Jason E. Sanabia, Ph.D., Plasma Radiation Group, Atomic Physics Division
The nature of chemisorbed CF3I and C2Cl4 on silicon surfaces has been studied using a variety of ultra-high vacuum surface-science techniques, including temperature-programmed desorption and electron-stimulated desorption. The sticking coefficients for both CF3I and C2Cl4 on 370 K silicon surfaces are near unity. For the CF3I-Si system, SiFx species and I desorb in temperature-programmed desorption. No molecular CF3I desorbs. For the C2Cl4-Si system, SiCl2 desorbs in temperature-programmed desorption. No molecular C2Cl4 desorbs. Low-energy (< 100 eV) electron-stimulated desorption of F+, F-, Cl+, and Cl- are detected, while only a trace of I+ and no I- are detected. The low iodine ion yield could be due to the large mass and radius of iodine. In temperature-programmed electron-stimulated desorption, the ion signals are recorded as the CF3I-Si and C2Cl4-Si surfaces are heated. This measurement demonstrates the sensitivity of the electron-stimulated desorption towards the state of the surface. There is evidence of quenching of electronically-excited states by adsorbed iodine.