Maritoni Litorja, Surface and Microanalysis Division, CSTL
The oxidation of Si(100) covered with deuterium, ethylene
and acetylene by oxygen atoms was studied using Auger electron spectroscopy.
Oxygen atoms were generated by vacuum ultraviolet (157 nm) laser photolysis
of molecular oxygen. The oxygen uptake is linear for oxide coverages
in the 1-3 monolayer range, and a difference in the facility of oxidation
is observed for the three systems. These reactivity differences are
discussed in terms of mechanistic, geometrical and electronic structural
differences for these adsorbate-surface systems.