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Semiconductors Programs & Projects

(showing 16 - 24 of 24)
Plasma Process Metrology
Last Updated Date: 01/20/2015

Our multifaceted program provides numerous outputs to assist our customers. First, we develop and evaluate a variety of measurement techniques … more

Analytical Transmission Scanning Electron Microscopy
Last Updated Date: 01/02/2015

This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable … more

Nanostructure Fabrication and Metrology
Last Updated Date: 12/11/2014

Single photons are the fundamental particles for all optical measurements. Single photon detectors made from avalanche photodiodes or … more

Theory of the optical properties of materials
Last Updated Date: 11/28/2014

The overarching objective of this project is reliably calculating the bulk optical properties of materials, such as complex index of refraction, … more

COMPLETED: Dimensional Metrology for Nanoscale Patterns
Last Updated Date: 04/17/2014

Our goal is to develop and demonstrate precise measurement methods that quantify the physical shape, critical dimensions (CD) and the structure of … more

Super-resolution Optical Microscopy
Last Updated Date: 03/24/2014

As the electronics and data storage industries build devices on ever decreasing scales, they need advanced imaging techniques that allow them to … more

Theory of Transport in Graphene
Last Updated Date: 03/21/2013

Graphene, a single layer of carbon atoms, is one of the most likely materials to produce the next breakthrough in the electronics industry.  Ideal … more

Thin Film X-Ray Reflectometry
Last Updated Date: 10/09/2012

Our goal is to develop Standard Reference Materials (SRMs) and quantitative, reproducible X-ray reflectometry (XRR) data analysis methods to … more

Nanocalorimetry
Last Updated Date: 10/01/2012

Nanocalorimetry using micromachined devices has the capability to provide quantitative data to support the development of advanced metal silicide … more

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