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971. Toward a Unified Advanced CD-SEM Specification for Sub 0.18 Micrometer Technology
Topic: Manufacturing
Published: 6/1/1998
Authors: J Allgair, C Archie, W Banke, H Bogardus, J Griffith, H Marchman, Michael T Postek, L Saraf, J Schlesinger, B Singh, N. Sullivan, L Trimble, Andras Vladar, A Yanof
Abstract: The stringent critical dimension (CD) control requirements in cutting edge device facilities have placed significant demands on metrologists and upon the tools they use. We are developing a unified, advanced critical dimension scanning electron micro ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823089

972. Toward the Ideal of Automating Production Optimization
Topic: Manufacturing
Published: 11/15/2013
Authors: John L Michaloski, Frederick M Proctor, Jorge Arinez, Jonatan Berglund
Abstract: The advent of improved factory data collection offers a prime opportunity to continuously study and optimize factory operations. Although manufacturing optimization tools can be considered mainstream technology, most U.S. manufacturers do not take fu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914707

973. Towards Accurate Feature Shape Metrology
Topic: Manufacturing
Published: 3/22/2008
Authors: Ndubuisi George Orji, Ronald G Dixson, B Bunday, J Allgair
Abstract: Over the last few years, the need for shape metrology for process control has increased. A key component of shape metrology is sidewall angle (SWA). However, few instruments measure SWA directly. The critical dimension atomic force microscope (CD-AFM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824629

974. Towards Information Networks to Support Composable Manufacturing
Topic: Manufacturing
Published: 10/15/2008
Authors: Mahesh Mani, Albert W Jones, Jun H. Shin, Ram D Sriram
Abstract: Rigid, supply-chain organizational structures are giving way to highly dynamic collaborative partnerships. These partnerships will develop rapidly by composing global manufacturing resources in response to open market opportunities; and, they will di ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824733

975. Towards Mobile Manipulator Safety Standards
Topic: Manufacturing
Published: 10/24/2013
Authors: Jeremy A Marvel, Roger V Bostelman
Abstract: We present an overview of the current safety standards for industrial robots and automated guided vehicles (AGVs), and describe how they relate to the safety concerns of mobile manipulators (robot arms mounted on mobile bases) in modern manufacturing ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913947

976. Towards Standards for Integrated Gaming and Simulation for Incident Management
Topic: Manufacturing
Published: 7/1/2007
Authors: Sanjay Jain, Charles R. McLean, Yung-Tsun Tina Lee
Abstract: Simulation and gaming can support decision making through all phases of incident management including prevention, preparedness, response, recovery and mitigation. A number of gaming and simulation tools have been developed for the purpose but they g ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822330

977. Towards a Domain-Specific Framework for Predictive Analytics in Manufacturing
Topic: Manufacturing
Published: 10/3/2014
Authors: David Jacques Antoine Lechevalier, Anantha Narayanan Narayanan, Rachuri Rachuri
Abstract: Data analytics is proving to be very useful for achieving productivity gains in manufacturing. Predictive analytics (using advanced machine learning) is particularly valuable in manufacturing, as it leads to production improvement with respect to the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916274

978. Towards a Method for Harmonizing Information Standards
Topic: Manufacturing
Published: 8/19/2009
Authors: Xenia Fiorentini, Rachuri Rachuri, Steven R. Ray, Ram D Sriram
Abstract: Designers and engineers use various engineering authoring tools, such as CAD, CAE, and PDM,, to generate information objects (engineering objects). On the business side, enterprise level business process modelers use various business authoring tools, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903057

979. Towards a Traceable Nanoscale Force Standard
Topic: Manufacturing
Published: 5/1/2001
Authors: Jon Robert Pratt, David B Newell, Edwin Ross Williams, Douglas T Smith, John A Kramar
Abstract: The National Institute of Standards and Technology has launched a five-year project to traceably link the International System of Units (SI) to forces between 10^u-8^N and 10^u-2^N. In this paper, we give a background and overview of this project, di ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821765

980. Trace water vapor analysis in specialty gases: sensor and spectroscopic approaches
Topic: Manufacturing
Published: 7/1/2013
Authors: Kristine A Bertness, Mark W. Raynor, Kevin C Cossel, Florian B. Adler, Jun Ye
Abstract: The analysis of water vapor impurity is important in a number of specialty gas applications. However the main driver for the development and advancement of trace H^u2^O analysis techniques has been the microelectronics industry. The International ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911233



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