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Topic Area: Manufacturing
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941. Tip Characterization for Dimensional Nanometrology
Topic: Manufacturing
Published: 1/1/1999
Author: John S Villarrubia
Abstract: Technological trends are increasingly requiring dimensional metrology at size scales below a micrometer. Scanning probe microscopy has unique advantages in this size regime, but width and roughness measurements must be corrected for imaging artifacts ...

942. Accuracy Differences Among Photomask Metrology Tools and Why They Matter
Topic: Manufacturing
Published: 12/1/1998
Author: James Edward Potzick
Abstract: A variety of different kinds of photomask critical dimensions (CD) metrology tools are available today to help meet current and future metrology challenges. These tools are based on different operating principles, and have different cost, throughput, ...

943. Characterization and Applications of On-Wafer Diode Noise Sources
Topic: Manufacturing
Published: 12/1/1998
Authors: Lawrence P. Dunleavy, James Paul Randa, David K Walker, Robert L Billinger, Joseph Paul Rice
Abstract: A set of wafer-probeable diode noise source transfer standards are characterized using on-wafer noise-temperature methods developed at the National Institute of Standards and Technology (NIST), Boulder, CO.

944. Calculation of Measurement Uncertainty Using Prior Information
Topic: Manufacturing
Published: 11/1/1998
Authors: Steven David Phillips, William Tyler Estler
Abstract: We describe the use of Bayesian inference to include prior information about the value of the measurand in the calculation of measurement uncertainty. Typical examples show this can, in effect, reduce the expanded uncertainty by up to 85 %. The ...

945. Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 11/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai
Abstract: No abstract.

946. A Simple Technique for Observing Fringe Interpolation Errors in Michelson Interferometers
Topic: Manufacturing
Published: 10/1/1998
Authors: Jack A Stone Jr, Lowell P. Howard
Abstract: We describe a simple, convenient method for measuring nonlinearities in displacement-measuring Michelson interferometers. Nonlinearities with a spatial periodicity of one optical fringe are a well-known source of error in precision interferometry. Ou ...

947. Application of Laser Feedback Metrology to a Hexapod Test Strut
Topic: Manufacturing
Published: 10/1/1998
Authors: M Schmidt-Lange, E Amatucci, Albert J. Wavering
Abstract: A laser position feedback system has been designed to improve the accuracy of strut positioning for the prototype Ingersoll2 Octahedral Hexapod machine installed at National Institute of Standards and Technology (NIST) (Figure 1). Strut laser fee ...

948. NIST Microform Calibration - How Does It Benefit U.S. Industry?
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Theodore Vincent Vorburger
Abstract: In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measurement unc ...

949. NIST Virtual/Physical Random Profile Roughness Calibration Standards
Topic: Manufacturing
Published: 10/1/1998
Authors: Jun-Feng Song, Christopher J. Evans, Michael L McGlauflin, Eric Paul Whitenton, Theodore Vincent Vorburger, Y B Yuan
Abstract: The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profi ...

950. National Institute of Standards and Technology - Texas Instruments Industrial Collaboratory Testbed
Topic: Manufacturing
Published: 10/1/1998
Authors: Michael T Postek, Marylyn H. Bennett, N J Zaluzec, Thomas E Wheatley, Samuel N Jones
Abstract: A portion of the mission of the NIST Manufacturing Engineering Laboratory (MEL) is to improve and advance length metrology in aid of U.S. Industry. This responsibility is found within the Precision Engineering Division (PED). The successful developme ...

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