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Topic Area: Manufacturing

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Displaying records 951 to 960 of 1000 records.
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951. Case Against Optical Gauge Block Metrology
Topic: Manufacturing
Published: 9/1/1998
Authors: Theodore D Doiron, Dennis S Everett, Bryon S. Faust, Eric S Stanfield, John Richard Stoup
Abstract: The current definition of length of a gage block is a very clever attempt to evade the systematic errors associated with the wringing layer thickness and optical phase corrections. In practice, there are very large systematic operator and surface eff ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820890

952. Minimizing Error Sources in Gage Block Mechanical Comparison Measurements
Topic: Manufacturing
Published: 9/1/1998
Authors: Bryon S. Faust, John Richard Stoup, Debra K Stanfield
Abstract: Error sources in gage block mechanical comparisons can range from classical textbook examples (thermal gradients, correct temperature value, and correct master value) to a completely counter-intuitive example of diamond probe tip wear at low applied ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820895

953. Minimizing Errors in Phase Change Correction Measurements for Gage Blocks Using a Spherical Contact Techniques
Topic: Manufacturing
Published: 9/1/1998
Authors: John Richard Stoup, Bryon S. Faust, Theodore D Doiron
Abstract: One of the most elusive measurement elements in gage block interferometry is the correction for the phase change on reflection. Techniques used to quantify this correction have improved over the years, but the measurement uncertainty has remained rel ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820914

954. Patterning on Passivated Semiconductor Surfaces
Topic: Manufacturing
Published: 8/7/1998
Authors: John A. Dagata, E Snow
Abstract: Abstract unavailable.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820734

955. NIST Calibration Services for Gas Flow Meters: Piston Prover and Bell Prover Gas Flow Facilities
Series: Special Publication (NIST SP)
Report Number: 250-49
Topic: Manufacturing
Published: 8/1/1998
Authors: John D Wright, G E. Mattingly
Abstract: This document provides a description of the small and medium range gas flow calibration facilities at the National Institute of Standards and Technology (NIST), Fluid Flow Group, as reported in NIST Special Publication 250 for Test Nos. 18010C-18040C ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830588

956. Accuracy and Traceability in Dimensional Measurements
Topic: Manufacturing
Published: 6/1/1998
Author: James Edward Potzick
Abstract: Dimensional measurements of importance to microlithography include feature sizes and feature placement on photomasks and wafers, overlay eccentricities, defect and particle sizes on masks and wafers, and many others. A common element is that the obje ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820907

957. Characterization of On-Wafer Diode Noise Sources
Topic: Manufacturing
Published: 6/1/1998
Authors: James Paul Randa, David K Walker, Lawrence P. Dunleavy, Robert L Billinger, Joseph Paul Rice
Abstract: A set of wafer probeable diode noise source transfer standards are characterized using on-wafer noise temperature methods developed recently at the National Institute of Standards and Technology (NIST). This paper reviews the methods for accurate on ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=27897

958. Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line
Topic: Manufacturing
Published: 6/1/1998
Authors: Richard M Silver, Carsten P. Jensen, V W. Tsai, Joseph Fu, John S Villarrubia, E Clayton Teague
Abstract: We are developing the instrumentation and prototype samples at NIST to enable the counting of atom-spacings across linewidth features etched in silicon. This is an effort to allow the accurate counting of atom-spacings across a feature in a controlle ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820909

959. Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope
Topic: Manufacturing
Published: 6/1/1998
Authors: Ronald G Dixson, R Koning, Theodore Vincent Vorburger, Joseph Fu, V W. Tsai
Abstract: Because atomic force microscopes (AFMs) are capable of generating three dimensional images with nanometer level resolution, these instruments are being increasingly used in many industries as tools for dimensional metrology at sub- micrometer length ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820889

960. Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
Topic: Manufacturing
Published: 6/1/1998
Author: John S Villarrubia
Abstract: In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have focused upon determining the tip shape by erosion of a tip characterizer of known geometry ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820919



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Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
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