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Topic Area: Manufacturing

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Displaying records 921 to 930 of 1000 records.
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921. Toward Nanometer Accuracy Measurements
Topic: Manufacturing
Published: 6/1/1999
Authors: John A Kramar, E Amatucci, David E. Gilsinn, Jay Shi Jun, William B. Penzes, Fredric Scire, E Clayton Teague, John S Villarrubia
Abstract: We at NIST are building a metrology instrument called the Molecular Measuring Machine (MMM) with the goal of performing 2D point-to-point measurements with one nanometer accuracy cover a 50 mm by 50 mm area. The instrument combines a scanning tunneli ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820933

922. Two-Dimensional Calibration Artifact and Measurement Methodology
Topic: Manufacturing
Published: 6/1/1999
Authors: Richard M Silver, Theodore D Doiron, William B. Penzes, S Fox, Edward A Kornegay, S Rathjen, M Takac, D Owen
Abstract: In this paper, we describe our design and the manufacturing of a two-dimensional grid artifact of chrome on quartz on a 6 inch by 6 inch by .250 glass blank. The design has been agreed upon by a number of SEMI participants working on a two-dimensiona ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820948

923. High Accuracy High Speed Gaussian Filter in Surface Metrology
Topic: Manufacturing
Published: 5/31/1999
Authors: Y B Yuan, Jun-Feng Song, Theodore Vincent Vorburger
Abstract: Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are developed for designing high accuracy and high speed recursive type Gaussian digital filter ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820955

924. Measurements and Predictions of Light Scattering by Coatings
Topic: Manufacturing
Published: 5/1/1999
Authors: Theodore Vincent Vorburger, Egon Marx, M E. McKnight, Maria E Nadal, P Y. Barnes, Alan K Thompson, Michael A Galler, Fern Y Hunt, Mark R VanLandingham
Abstract: We show comparisons between calculations and measurements of angle-resolved light scattering distributions from clear dielectric, isotropic coatings. The calculated distributions are derived from topography measurements performed with scanning white ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822523

925. The NIST Length Scale Interferometer
Topic: Manufacturing
Published: 5/1/1999
Authors: John S Beers, William B. Penzes
Abstract: The National Institute of Standards and Technology (NIST) interferometer for measuring graduated length scales has been in use since 1965. It was developed in response to the redefinition of the meter in 1960 from the prototype platinum-iridium bar t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820924

926. Improving Kinematic Touch Trigger Probe Performance
Topic: Manufacturing
Published: 4/1/1999
Authors: Steven David Phillips, William Tyler Estler
Abstract: Kinematic touch trigger probes are widely used on CMMs. This article gives CMM users advice on how to minimize the systematic errors associated with this class of probes.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820943

927. Noise Averaging and Measurement Resolution (or A Little Noise is a Good Thing)
Topic: Manufacturing
Published: 4/1/1999
Author: James Edward Potzick
Abstract: When a continuous quantity is measured with a digital instrument or digitized for further processing, a measurement uncertainty component is incurred from quantization of the continuous variable. This uncertainty can be reduced by oversampling and a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823107

928. A Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
Topic: Manufacturing
Published: 3/1/1999
Author: John S Villarrubia
Abstract: In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have focused upon determining the tip geometry by erosion of a tip characterizer of known geomet ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822529

929. Detector Strategy for the Scanning Electron Microscope Inspection and Metrology of Semiconductor Wafers
Topic: Manufacturing
Published: 3/1/1999
Authors: O C Wells, Michael T Postek
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821794

930. Nanometre-scale Oxidation of Silicon Surfaces by Dynamic Force Microscopy: Reproducibility, Kinetics and Nanofabrication
Topic: Manufacturing
Published: 3/1/1999
Authors: M Calleja, J Anguita, R Garcia, K Birkelund, F Perez-murano, John A Dagata
Abstract: Local oxidation of silicon surfaces by scanning probe microscopy is a very promising lithographic approach at nanometre scale. Here, we present two approaches to optimize the oxidation for nanofabrication purposes: (i) we analyse the reproducibility ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821777



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