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Displaying records 21 to 30 of 82 records.
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21. EUVL dosimetry at NIST
Topic: Optics
Published: 3/13/2009
Authors: Charles S Tarrio, Steven E Grantham, Marc J Cangemi, Robert Edward Vest, Thomas B Lucatorto, Noreen Harned
Abstract: As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. Recently, we undertook a major effort in accurately measuring the sensitivity of three ...

22. Effect of Bandwidth and Numerical Aperture in Optical Scatterometry
Topic: Optics
Published: 3/1/2010
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions ...

23. Effect of Line Width Roughness on Optical Scatterometry Measurements
Topic: Optics
Published: 4/6/2009
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line width roughness (LWR) has been identified as a potential source of uncertainty in scatterometry measurements, and characterizing its effect is required to improve the method s accuracy and to make measurements traceable. In this work, we extend ...

24. Effect of Surface Modes on Photon Propagation through Dielectric Bandgaps
Topic: Optics
Published: 10/28/2009
Authors: Natalia Malkova, Sergey V Polyakov, Alan L Migdall, Garnett W Bryant
Abstract: We investigate the Hartman saturation effect of photons traveling through barriers created by bandgaps of multilayer stacks. In particular, we investigate theoretically the recently observed jumps in photon transversal times due to adding a single l ...

25. Effective medium approximations for modeling optical reflectance from gratings with rough edges
Topic: Optics
Published: 5/1/2010
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line edge roughness (LER) has been identified as a potential source of uncertainty in optical scatterometry measurements. Characterizing the effect of LER on optical scatterometry signals is required to assess measurement uncertainty. However, rigor ...

26. Effects of Roughness on Scatterometry Signatures
Topic: Optics
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...

27. Efficient quantum dot single photon extraction into an optical fiber using a nanophotonic directional coupler
Topic: Optics
Published: 9/19/2011
Authors: Marcelo Ishihara Davanco, Matthew T. Rakher, W. Wegscheider, Dieter Schuh, Antonio Badolato, Kartik A Srinivasan
Abstract: We demonstrate a spectrally broadband and efficient technique for collecting photoluminescence from a single InAs quantum dot directly into a standard single mode optical fiber. In this approach, an optical fiber taper waveguide is placed in contact ...

28. Electromagnetic Energy Density in Dispersive and Dissipative Media
Topic: Optics
Published: 6/1/2011
Authors: Frederico D. Nunes, Thiago Vasconcelos, Marcel Bezerra, John Weiner
Abstract: The description of the energy density associated with an electromagnetic field propagating through matter must treat two different phenomena: dispersion, the variation of the refractive index with frequency, and dissipation, the loss of field energy ...

29. Enhanced coupling between light and surface plasmons by nanostructured Fabry-Pérot resonator
Topic: Optics
Published: 9/26/2011
Authors: Brian S. Dennis, Vladimir A Aksyuk, Michael Haftel, Stefan T. Koev, Girsh Blumberg
Abstract: It is recognized that surface plasmons (SPs),which can be present on particulate, smooth, or corrugated metallic surfaces, have enormous potential in the fields of novel nano-optical and opto-electronic devices, as well as in spectroscopic, biologic ...

30. Exotic behavior in quantum dot mode-locked lasers: dark pulses and bistability
Topic: Optics
Published: 5/24/2012
Authors: Kevin Lawrence Silverman, Mingming M. Feng, Richard P Mirin, Steven T Cundiff
Abstract: Passively mode-locked semiconductor lasers with self-assembled quantum dot active regions can be operated in exotic output modes, stabilized by the complex gain and absorption dynamics inherent in these structures. One such device emits dark pulses ...

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