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Topic Area: Optics
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Displaying records 61 to 70 of 78 records.
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61. Effect of Surface Modes on Photon Propagation through Dielectric Bandgaps
Topic: Optics
Published: 10/28/2009
Authors: Natalia Malkova, Sergey V Polyakov, Alan L Migdall, Garnett W Bryant
Abstract: We investigate the Hartman saturation effect of photons traveling through barriers created by bandgaps of multilayer stacks. In particular, we investigate theoretically the recently observed jumps in photon transversal times due to adding a single l ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902593

62. Coalescing GSICS Correction Coefficients
Topic: Optics
Published: 8/14/2009
Author: Ruediger Kessel
Abstract: We would like to present a technique to adjust the uncertainty estimates of each point in a time series, so that the variance of the time series is consistent with the uncertainty estimates of its component points. This would allow the uncertainty of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902591

63. Developing an Uncertainty Analysis for Optical Scatterometry
Topic: Optics
Published: 8/3/2009
Authors: Thomas Avery Germer, Heather J Patrick, Richard M Silver, Benjamin Bunday
Abstract: This article describes how an uncertainty analysis may be performed on a scatterometry measurement. A method is outlined for propagating uncertainties through a least-squares regression. The method includes the propagation of the measurement noise as ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901617

64. Tracking down sources of carbon contamination in EUVL exposure tools
Topic: Optics
Published: 8/3/2009
Authors: Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto, R. Caudillo
Abstract: Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901665

65. Imaging Response of Optical Microscopes Containing Angled Micromirrors
Topic: Optics
Published: 4/30/2009
Authors: Andrew J. Berglund, Matthew D. McMahon, Jabez J McClelland, James Alexander Liddle
Abstract: We describe the aberrations induced by introducing micromirrors into the object space of a microscope. These play a critical role in determining the accuracy of recent three-dimensional particle tracking methods based on such devices.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901416

66. Frequency comb spectroscopy with coherent optical sampling
Topic: Optics
Published: 4/20/2009
Authors: Ian R Coddington, Nathan Reynolds Newbury, William C Swann
Abstract: A stabilized frequency comb provides a broadband array of highly resolved comb lines. Using a multiheterodyne technique, we measure the amplitude and phase of every comb line, allowing for massively parallel, high-resolution spectroscopy.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901385

67. Effect of Line Width Roughness on Optical Scatterometry Measurements
Topic: Optics
Published: 4/6/2009
Authors: Brent C. Bergner, Thomas Avery Germer, Thomas Suleski
Abstract: Line width roughness (LWR) has been identified as a potential source of uncertainty in scatterometry measurements, and characterizing its effect is required to improve the method s accuracy and to make measurements traceable. In this work, we extend ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901895

68. EUVL dosimetry at NIST
Topic: Optics
Published: 3/13/2009
Authors: Charles S Tarrio, Steven E Grantham, Marc J Cangemi, Robert Edward Vest, Thomas B Lucatorto, Noreen Harned
Abstract: As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. Recently, we undertook a major effort in accurately measuring the sensitivity of three ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901663

69. Fiber optic measurement considerations for the aerospace industry: Lessons learned from telecommunications
Topic: Optics
Published: 9/30/2008
Authors: Paul A Williams, Timothy J Drapela
Abstract: A brief history of measurement work for fiber optic telecommunications with application toward fiber optics in avionics
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=33048

70. Angle-dependent infrared reflectance measurements in support of VIIRS
Topic: Optics
Published: 8/14/2008
Authors: Simon Grant Kaplan, Leonard M Hanssen, Enrique J. Iglesias
Abstract: We have developed a goniometric reflectometer using a Fourier-transform infrared (FTIR) spectrometer source for polarized reflectance measurements from 1 um to 20 um wavelength at angles of incidence from 10° to 80°, with an incident beam geometry of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=842529



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