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Topic Area: Optical Metrology
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Displaying records 71 to 80 of 112 records.
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71. Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We measure the Mueller matrix bidirectional reflectance distribution function (BRDF) of pressed and sintered powdered polytetrafluoroethylene (PTFE) reflectance standards for an incident angle of 75°. Rotationally averaged Mueller matrices from the m ...

72. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...

73. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. (Francois) Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...

Topic: Optical Metrology
Published: 7/11/2008
Authors: Yuqin Zong, Yoshihiro Ohno
Abstract: The measurement of high-power light emitting diodes (LEDs) has been difficult because they are highly sensitive to thermal operating conditions, and there has been a lack of common methods that can be used by both LED manufactures and users to acquir ...

75. NIST Goniospectrometer for Surface Color Measurements
Topic: Optical Metrology
Published: 7/7/2008
Authors: Maria E Nadal, Gael Obein
Abstract: The goniospectrometer at the National Institute of Standards and Technology (NIST) can measure the spectral reflectance of colored samples over a wide range of illumination and viewing angles. This capability is important for the colorimetric charact ...

76. NIST s Integrated Colony Enumerator (NICE)
Topic: Optical Metrology
Published: 8/11/2009
Authors: Matthew Lawrence Clarke, Jeeseong Hwang
Abstract: Enumeration of bacterial colonies in an agar plate is simple in concept, but automated colony counting is difficult due to variations in colony color, size, shape, contrast, and density, as well as colony overlap. Furthermore, in applications where ...

77. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...

78. Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Topic: Optical Metrology
Published: 12/12/2012
Authors: Brian Gregory Burke, William A Osborn, Richard Swift Gates, David A LaVan
Abstract: We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts s ...

79. Non-Destructive Characterization of the Morphology of a Polymer Co-Extruded Scaffold Using Optical Coherence Tomography
Topic: Optical Metrology
Published: 12/19/2001
Authors: Joy P Dunkers, N Washburn, Carl George Simon Jr, Alamgir Karim, Eric J. Amis
Abstract: It is generally understood that a complex interaction of many variables controls the success of cell infiltration, proliferation, and differentiation within a tissue scaffold. One parameter that has a large influence on the development of functionin ...

80. Optical Coherence Tomography of Glass Reinforced Polymer Composites
Topic: Optical Metrology
Published: 1/1/1999
Authors: Joy P Dunkers, Richard~undefined~undefined~undefined~undefined~undefined Parnas, C G Zimba, R C Peterson, Kathleen M. Flynn, J G Fujimoto, B E Bouma
Abstract: Optical coherence tomography (OCT) is a non-destructive and non-contact technique to image microstructure within scattering media. The application of OCT to highly scattering materials such as polymer composites is especially challenging. In this w ...

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