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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 11 to 20 of 73 records.
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11. Coupled-cavity ring-down spectroscopy technique
Topic: Optical Metrology
Published: 8/6/2012
Authors: Jeremie B. Courtois, Joseph Terence Hodges
Abstract: We present a technique called coupled-cavity ring-down spectroscopy (CC-RDS) for controlling the finesse of an optical resonator. Applications include extending the sensitivity and dynamic range of a cavity-enhanced spectrometer, as well as widening ...

12. Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization
Topic: Optical Metrology
Published: 11/5/2015
Authors: Jing Qin, Richard M Silver, Bryan M Barnes, Hui Zhou, Ronald G Dixson, Mark Alexander Henn
Abstract: Quantitative optical measurements of deep sub-wavelength, three-dimensional, nanometric structures with sensitivity to sub-nanometer details address an ubiquitous measurement challenge. A Fourier domain normalization approach is used in the Fourier ...

13. Defining the visual adaptation field for mesopic photometry: How does a high-luminance source affect peripheral adaptation?
Topic: Optical Metrology
Published: 10/25/2015
Authors: Yoshihiro Ohno, Tatsukiyo Uchida
Abstract: CIE 191:2010 recommends the mesopic photometry system, in which the luminous efficiency function is determined from the adaptation luminance. However, it cannot be practically implemented because the adaptation field to determine the adaptation l ...

14. Dual frequency combs at 3.4 µm with subhertz residual linewidths
Topic: Optical Metrology
Published: 5/1/2010
Authors: Esther Baumann, Fabrizio Raphael Giorgetta, Ian R Coddington, William C Swann, Nathan Reynolds Newbury
Abstract: Two coherent 1.5-µm frequency combs are transferred to 3.4 µm by difference frequency generation with a 1064 nm cw laser. From a multi-heterodyne measurement, the residual linewidth between the comb teeth is resolution-limited at 200 mHz.

15. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...

16. Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus
Topic: Optical Metrology
Published: 4/10/2013
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Abraham Arceo
Abstract: To measure the new SEMATECH 9 nm node Intentional Defect Array (IDA) and subsequent small, complex defects, a methodology has been used to exploit the rich information content generated when simulating or acquiring several images of sub-wavelength-si ...

17. Enhancing Image Contrast Using Coherent States and Photon Number Resolving Detectors
Topic: Optical Metrology
Published: 3/15/2010
Authors: Aaron Pearlman, Alexander E. Ling, Elizabeth A. Goldschmidt, Jingyun Fan, Christoph Wildfeuer, Alan L Migdall
Abstract: We experimentally map the transverse profile of diffraction-limited beams using photon number resolving detectors. We observe strong compression of diffracted beam profiles for high detected photon number. This effect leads to higher contrast than ...

18. Experimental Bounds on Classical Random Field Theories
Topic: Optical Metrology
Published: 12/10/2014
Authors: Joffrey Kent Peters, Sergey V Polyakov, Jingyun Fan, Alan L Migdall
Abstract: Alternative theories to quantum mechanics motivate important fundamental tests of our understanding and description of the smallest physical systems. Here we place experimental limits on those classical field theories which result in power-depend ...

19. Far Infrared Characterization of Single and Double Walled Carbon Nanotubes
Topic: Optical Metrology
Published: 1/17/2011
Authors: Shin G. Chou, Zeeshan Ahmed, Georgy Samsonidze, Jing Kong, Mildred Dresselhaus
Abstract: Variable temperature high resolution far infrared absorption measurements were carried out for single walled carbon nanotubes samples with different diameter distributions. At a temperature where kBT is significantly lower than the phonon energy, th ...

20. Fast high-resolution frequency agile spectroscopy of laser sources
Topic: Optical Metrology
Published: 10/24/2010
Authors: Fabrizio Raphael Giorgetta, Ian R Coddington, Esther Baumann, William C Swann, Nathan Reynolds Newbury
Abstract: Time-resolved, high-accuracy and high-resolution spectroscopy of frequency-agile cw lasers is critical to realizing their full potential for sensing, but is not possible with conventional spectroscopy methods. We demonstrate a dual comb-based spectro ...

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