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Displaying records 11 to 20 of 64 records.
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11. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

12. Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus
Topic: Optical Metrology
Published: 4/10/2013
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Abraham Arceo
Abstract: To measure the new SEMATECH 9 nm node Intentional Defect Array (IDA) and subsequent small, complex defects, a methodology has been used to exploit the rich information content generated when simulating or acquiring several images of sub-wavelength-si ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913542

13. Enhancing Image Contrast Using Coherent States and Photon Number Resolving Detectors
Topic: Optical Metrology
Published: 3/15/2010
Authors: Aaron Pearlman, Alexander E. Ling, Elizabeth A Goldschmidt, Jingyun Fan, Christoph Wildfeuer, Alan L Migdall
Abstract: We experimentally map the transverse profile of diffraction-limited beams using photon number resolving detectors. We observe strong compression of diffracted beam profiles for high detected photon number. This effect leads to higher contrast than ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904224

14. Experimental Bounds on Classical Random Field Theories
Topic: Optical Metrology
Published: 12/10/2014
Authors: Joffrey Kent Peters, Sergey V Polyakov, Jingyun Fan, Alan L Migdall
Abstract: Alternative theories to quantum mechanics motivate important fundamental tests of our understanding and description of the smallest physical systems. Here we place experimental limits on those classical field theories which result in power-depend ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=917261

15. Far Infrared Characterization of Single and Double Walled Carbon Nanotubes
Topic: Optical Metrology
Published: 1/17/2011
Authors: Shin G. Chou, Zeeshan Ahmed, Georgy Samsonidze, Jing Kong, Mildred Dresselhaus
Abstract: Variable temperature high resolution far infrared absorption measurements were carried out for single walled carbon nanotubes samples with different diameter distributions. At a temperature where kBT is significantly lower than the phonon energy, th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906962

16. Fast high-resolution frequency agile spectroscopy of laser sources
Topic: Optical Metrology
Published: 10/24/2010
Authors: Fabrizio Raphael Giorgetta, Ian R Coddington, Esther Baumann, William C Swann, Nathan Reynolds Newbury
Abstract: Time-resolved, high-accuracy and high-resolution spectroscopy of frequency-agile cw lasers is critical to realizing their full potential for sensing, but is not possible with conventional spectroscopy methods. We demonstrate a dual comb-based spectro ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905724

17. Filter Transmittance Measurements in the Infrared
Topic: Optical Metrology
Published: 1/1/1993
Authors: Alan L Migdall, A Frenkel, Daniel E. Kelleher
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=104043

18. Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction
Topic: Optical Metrology
Published: 9/5/2013
Authors: Jing Qin, Richard M Silver, Bryan M Barnes, Hui Zhou, Francois R. Goasmat
Abstract: There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimens ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913587

19. High precision, broadband optical measurements with fiber laser frequency combs
Topic: Optical Metrology
Published: 11/2/2010
Authors: Nathan Reynolds Newbury, Ian R Coddington, Esther Baumann, Fabrizio Raphael Giorgetta, William C Swann, Alexander M. Zolot
Abstract: Optical frequency combs have been used extensively, and with remarkable success, to measure the absolute frequency of cw lasers. The use of frequency combs has also expanded to include applications such as precision ranging, component metrology, and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907200

20. Illuminance responsivity calibration of reference photometers at the NIST SIRCUS and SCF facilities
Topic: Optical Metrology
Published: 5/29/2009
Authors: George P Eppeldauer, Carl C Miller, Thomas C Larason, Yoshihiro Ohno
Abstract: The illuminance responsivities of two transfer standard photometers have been directly determined from their spectral responsivity calibrations at two different calibration facilities of NIST. The main characteristics of the two photometers, and thei ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=902807



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