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You searched on: Topic Area: Optical Metrology Sorted by: title

Displaying records 51 to 55.
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51. TSOM Method for Semiconductor Metrology
Topic: Optical Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908177

52. Time and Frequency-Domain Spectroscopy with Dual Frequency Combs
Topic: Optical Metrology
Published: 5/28/2009
Authors: Nathan Reynolds Newbury, Ian R Coddington, William C Swann
Abstract: High-resolution spectroscopic measurements of the amplitude and phase spectra from a gas sample can be acquired by use of dual frequency combs. Here we discuss the corresponding gas signature in the time domain.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901109

53. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Optical Metrology
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698

54. Wavelength References for Optical Interferometry
Topic: Optical Metrology
Published: 6/12/2005
Authors: Richard W Fox, Leo W. Hollberg
Abstract: We are exploring air wavelength references useful for interferometry. Femtosecond comb frequency measurements determine mode wavelengths of a stable optical cavity in vacuum, and subsequently a tunable laser is locked to the modes in air.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30063

55. Weak value thermostat with 0.2 mK precision
Topic: Optical Metrology
Published: 12/1/2012
Authors: Patrick F Egan, Jack A Stone Jr.
Abstract: A new laser-based thermostat sensitive to 0.2 mK at room temperature is reported. The method utilizes a fluid-filled prism and interferometric weak value amplification to sense nanoradian deviations of a laser beam: due to the high thermooptic coef ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912232



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