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Topic Area: Optical Metrology
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Displaying records 31 to 40 of 117 records.
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31. TSOM Method for Nanoelectronics Dimensional Metrology
Topic: Optical Metrology
Published: 11/18/2011
Author: Ravikiran Attota
Abstract: Through-focus scanning optical microscopy (TSOM) is a relatively new method that transforms conventional optical microscopes into truly three-dimensional metrology tools for nanoscale to microscale dimensional analysis. TSOM achieves this by acquirin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908623

32. Microwave generation with low residual phase noise from a femtosecond fiber laser with an intracavity electro-optic modulator
Topic: Optical Metrology
Published: 11/14/2011
Authors: William C Swann, Esther Baumann, Fabrizio Raphael Giorgetta, Nathan Reynolds Newbury
Abstract: Low phase-noise microwave generation has previously been demonstrated using self-referenced frequency combs to divide down a low noise optical reference. We demonstrate an approach based on a fs Er-fiber laser that avoids the complexity of self-r ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907443

33. Microwave generation with low residual phase noise from a femtosecond fiber laser with an intracavity electro-optic modulator
Topic: Optical Metrology
Published: 11/14/2011
Authors: William C Swann, Esther Baumann, Fabrizio Raphael Giorgetta, Nathan Reynolds Newbury
Abstract: Low phase-noise microwave generation has previously been demonstrated using self-referenced frequency combs to divide down a low noise optical reference. We demonstrate an approach based on a fs Er-fiber laser that avoids the complexity of self-refer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909568

34. Dual-comb-based characterization of rapidly tuned lasers
Topic: Optical Metrology
Published: 10/10/2011
Authors: Fabrizio Raphael Giorgetta, Esther Baumann, Ian R Coddington, William C Swann, Nathan Reynolds Newbury, Zeb W Barber, Peter Roos
Abstract: We demonstrate a technique to calibrate the instantaneous frequency versus time from a rapidly tuned cw laser. Our dual-comb-based spectrometer can measure optical waveforms tuned at 1500-THz/s rates over 5-THz bandwidths at high precision.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908712

35. THz Spectroscopic Study of Rust Layer on Aged Steel-Reinforced Structural Components
Topic: Optical Metrology
Published: 9/26/2011
Authors: David F Plusquellic, Virgil Provenzano, Shin G. Chou
Abstract: In this study, we use THz-based spectroscopy as a non-destructive diagnostic tool to characterize the corrosion by-products (rust) on aged iron structural components. Even though previous Mossbauer spectroscopic findings suggested the presence of an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907023

36. Fully lithographic fiber-coupled cryogenic radiometer for picowatt powers
Topic: Optical Metrology
Published: 9/19/2011
Authors: Nathan A Tomlin, John H Lehman, Sae Woo Nam
Abstract: A new type of absolute cryogenic radiometer has been fabricated at the microscale level for direct substitution optical fiber power measurements. It consists of three parts: an absorber, electrical heater, and thermometer all on a single micro-machin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908339

37. Increased responsivity pyroelectric radiometer with dome input and temperature control
Topic: Optical Metrology
Published: 7/18/2011
Authors: George P Eppeldauer, Jinan Zeng, Leonard M Hanssen
Abstract: Pyroelectric radiometers with noise-equivalent-power (NEP) close to 1 nW/Hz¿ have been developed to measure less than 1 microwatt radiant power levels at room temperature to 25 micrometer. The radiometers will be used as transfer standards for routin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908993

38. Dimensional Analysis of Through Silicon Vias Using the TSOM Method
Topic: Optical Metrology
Published: 7/12/2011
Authors: Ravikiran Attota, Andrew Rudack
Abstract: There is a great need for accurate, truly-3D metrology solutions that can be used for analysis of high aspect ratio features such as through-silicon-vias (TSVs). Through-focus scanning optical microscopy (TSOM) is an optical metrology method that pr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909226

39. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907243

40. Absolute refractometry of dry gas to {+ or -}3 parts in 10^u9^
Topic: Optical Metrology
Published: 6/20/2011
Authors: Patrick F Egan, Jack A Stone Jr
Abstract: We present a method of measuring the refractive index of dry gases absolutely at 632.8 nm wavelength using a Fabry-Perot cavity with an expanded uncertainty of < 3 {multiply} 10^u-9^ (coverage factor {I}k{/I} = 2. The main contribution to this uncer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907731



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