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Topic Area: Optical Metrology
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Displaying records 31 to 40 of 112 records.
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31. THz Spectroscopic Study of Rust Layer on Aged Steel-Reinforced Structural Components
Topic: Optical Metrology
Published: 9/26/2011
Authors: David F Plusquellic, Virgil Provenzano, Shin G. Chou
Abstract: In this study, we use THz-based spectroscopy as a non-destructive diagnostic tool to characterize the corrosion by-products (rust) on aged iron structural components. Even though previous Mossbauer spectroscopic findings suggested the presence of an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907023

32. Increased responsivity pyroelectric radiometer with dome input and temperature control
Topic: Optical Metrology
Published: 7/18/2011
Authors: George P Eppeldauer, Jinan Zeng, Leonard M Hanssen
Abstract: Pyroelectric radiometers with noise-equivalent-power (NEP) close to 1 nW/Hz¿ have been developed to measure less than 1 microwatt radiant power levels at room temperature to 25 micrometer. The radiometers will be used as transfer standards for routin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908993

33. Dimensional Analysis of Through Silicon Vias Using the TSOM Method
Topic: Optical Metrology
Published: 7/12/2011
Authors: Ravikiran Attota, Andrew Rudack
Abstract: There is a great need for accurate, truly-3D metrology solutions that can be used for analysis of high aspect ratio features such as through-silicon-vias (TSVs). Through-focus scanning optical microscopy (TSOM) is an optical metrology method that pr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909226

34. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907243

35. Absolute refractometry of dry gas to {+ or -}3 parts in 10^u9^
Topic: Optical Metrology
Published: 6/20/2011
Authors: Patrick F Egan, Jack A Stone Jr
Abstract: We present a method of measuring the refractive index of dry gases absolutely at 632.8 nm wavelength using a Fabry-Perot cavity with an expanded uncertainty of < 3 {multiply} 10^u-9^ (coverage factor {I}k{/I} = 2. The main contribution to this uncer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907731

36. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

37. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907610

38. Binary amplitude holograms made from dyed photoresist
Topic: Optical Metrology
Published: 5/13/2011
Authors: Quandou Wang, Ulf Griesmann, John H Burnett
Abstract: A method for fabricating binary amplitude holograms from a dyed photoresist is described. It is of particular interest for holograms that are used as null lenses in the form metrology of aspheric surfaces and wavefronts. A pigment that stron ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907217

39. Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We measure the Mueller matrix bidirectional reflectance distribution function (BRDF) of pressed and sintered powdered polytetrafluoroethylene (PTFE) reflectance standards for an incident angle of 75°. Rotationally averaged Mueller matrices from the m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909321

40. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372



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