Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publications Portal

You searched on: Topic Area: Optical Metrology

Displaying records 41 to 50 of 70 records.
Resort by: Date / Title


41. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Optical Metrology
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905395

42. Microwave generation with low residual phase noise from a femtosecond fiber laser with an intracavity electro-optic modulator
Topic: Optical Metrology
Published: 11/14/2011
Authors: William C Swann, Esther Baumann, Fabrizio Raphael Giorgetta, Nathan Reynolds Newbury
Abstract: Low phase-noise microwave generation has previously been demonstrated using self-referenced frequency combs to divide down a low noise optical reference. We demonstrate an approach based on a fs Er-fiber laser that avoids the complexity of self-refer ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909568

43. THz Spectroscopic Study of Iron Oxide Layers within Steel-Reinforced Structural Components
Topic: Optical Metrology
Published: 9/26/2011
Authors: Virgil Provenzano, Shin G. Chou
Abstract: In this study, we use THz-based spectroscopy as a non-destructive diagnostic tool to characterize the corrosion by-products (rust) on aged iron structural components. Even though previous Mossbauer spectroscopic findings suggested the presence of an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907023

44. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907243

45. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

46. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907610

47. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372

48. TSOM Method for Semiconductor Metrology
Topic: Optical Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908177

49. Introduction to special issue on single-photon technologies
Topic: Optical Metrology
Published: 3/10/2011
Authors: Alan L Migdall, Sergey V Polyakov, Jingyun Fan, Ivo Pietro Degiovanni, Jessica Cheung
Abstract: This special issue accompanies the 4th international conference on single-photon technologies held at the National Institute of Standards and Technology (NIST) Boulder in November 2009. This community has met every two years at national metrology ins ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907536

50. Far Infrared Characterization of Single and Double Walled Carbon Nanotubes
Topic: Optical Metrology
Published: 1/17/2011
Authors: Shin G. Chou, Zeeshan Ahmed, Georgy Samsonidze, Jing Kong, Mildred Dresselhaus
Abstract: Variable temperature high resolution far infrared absorption measurements were carried out for single walled carbon nanotubes samples with different diameter distributions. At a temperature where kBT is significantly lower than the phonon energy, th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906962



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series