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Topic Area: Optical Metrology

Displaying records 41 to 50 of 117 records.
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41. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908805

42. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907610

43. Binary amplitude holograms made from dyed photoresist
Topic: Optical Metrology
Published: 5/13/2011
Authors: Quandou Wang, Ulf Griesmann, John H Burnett
Abstract: A method for fabricating binary amplitude holograms from a dyed photoresist is described. It is of particular interest for holograms that are used as null lenses in the form metrology of aspheric surfaces and wavefronts. A pigment that stron ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907217

44. Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Heather J Patrick
Abstract: We measure the Mueller matrix bidirectional reflectance distribution function (BRDF) of pressed and sintered powdered polytetrafluoroethylene (PTFE) reflectance standards for an incident angle of 75°. Rotationally averaged Mueller matrices from the m ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909321

45. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908372

46. TSOM Method for Semiconductor Metrology
Topic: Optical Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908177

47. Introduction to special issue on single-photon technologies
Topic: Optical Metrology
Published: 3/10/2011
Authors: Alan L Migdall, Sergey V Polyakov, Jingyun Fan, Ivo Pietro Degiovanni, Jessica Cheung
Abstract: This special issue accompanies the 4th international conference on single-photon technologies held at the National Institute of Standards and Technology (NIST) Boulder in November 2009. This community has met every two years at national metrology ins ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907536

48. Experimental realization of a low-noise heralded single photon source
Topic: Optical Metrology
Published: 1/17/2011
Authors: Alan L Migdall, Sergey V Polyakov, Marco Genovese, Fabrizio Piacentini, I. Ruo Berchera, Ivo P Degiovanni, Giorgio Brida
Abstract: We present a heralded single-photon source with a much lower level of unwanted background photons in the output channel by using the herald photon to control a shutter in the heralded channel. The shutter is implemented using a simple field program ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906225

49. Far Infrared Absorption Measurements of Single Walled Carbon Nanotubes
Topic: Optical Metrology
Published: 1/17/2011
Authors: Shin G. Chou, Zeeshan Ahmed, Georgy Samsonidze, Jing Kong, Mildred Dresselhaus, David F Plusquellic
Abstract: Variable temperature high resolution far infrared absorption measurements were carried out for single walled carbon nanotubes samples with different diameter distributions. At a temperature where kBT is significantly lower than the phonon energy, th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906962

50. High precision, broadband optical measurements with fiber laser frequency combs
Topic: Optical Metrology
Published: 11/2/2010
Authors: Nathan Reynolds Newbury, Ian R Coddington, Esther Baumann, Fabrizio Raphael Giorgetta, William C Swann, Alexander M. Zolot
Abstract: Optical frequency combs have been used extensively, and with remarkable success, to measure the absolute frequency of cw lasers. The use of frequency combs has also expanded to include applications such as precision ranging, component metrology, and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907200



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