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You searched on: Topic Area: Optical Metrology

Displaying records 41 to 50 of 67 records.
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41. Metrologia
Topic: Optical Metrology
Published: 7/8/2011
Authors: Uwe Arp, Zhigang Li, Ping-Shine Shaw, Mathias Richter, Roman Klein, Wolfgang Paustian, Reiner Thornagel
Abstract: We report on a successful bilateral inter-comparison between the Physikalisch-Technische Bundesanstalt (PTB) and the National Institute of Standards and Technology (NIST). In both laboratories deuterium lamps were calibrated using the calculability o ...

42. Effects of Roughness on Scatterometry Signatures
Topic: Optical Metrology
Published: 5/26/2011
Authors: Martin Foldyna, Thomas Avery Germer, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configuratio ...

43. Progress toward redetermining the Boltzmann constant with a fixed-path-length cylindrical resonator
Topic: Optical Metrology
Published: 5/21/2011
Authors: Jintao Zhang, H. Lin, X.J. Feng, J.P. Sun, Keith A Gillis, Michael R Moldover, Y.Y. Duan
Abstract: We used a single, fixed-path-length cylindrical-cavity resonator to measure {I}c{/I}^d0^ = (307.8252 {+ or -} 0.0012) m{bullet}s^u−1^, the zero-density limit of the speed of sound in pure argon at the temperature of the triple point of water. ...

44. Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
Topic: Optical Metrology
Published: 4/20/2011
Authors: Thomas Avery Germer, Martin Foldyna, Brent Bergner
Abstract: We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). The unperturbed, reference grating profile was determined from multip ...

45. TSOM Method for Semiconductor Metrology
Topic: Optical Metrology
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...

46. Introduction to special issue on single-photon technologies
Topic: Optical Metrology
Published: 3/10/2011
Authors: Alan L Migdall, Sergey V Polyakov, Jingyun Fan, Ivo Pietro Degiovanni, Jessica Cheung
Abstract: This special issue accompanies the 4th international conference on single-photon technologies held at the National Institute of Standards and Technology (NIST) Boulder in November 2009. This community has met every two years at national metrology ins ...

47. Far Infrared Characterization of Single and Double Walled Carbon Nanotubes
Topic: Optical Metrology
Published: 1/17/2011
Authors: Shin G. Chou, Zeeshan Ahmed, Georgy Samsonidze, Jing Kong, Mildred Dresselhaus
Abstract: Variable temperature high resolution far infrared absorption measurements were carried out for single walled carbon nanotubes samples with different diameter distributions. At a temperature where kBT is significantly lower than the phonon energy, th ...

48. High precision, broadband optical measurements with fiber laser frequency combs
Topic: Optical Metrology
Published: 11/2/2010
Authors: Nathan Reynolds Newbury, Ian R Coddington, Esther Baumann, Fabrizio Raphael Giorgetta, William C Swann, Alexander M. Zolot
Abstract: Optical frequency combs have been used extensively, and with remarkable success, to measure the absolute frequency of cw lasers. The use of frequency combs has also expanded to include applications such as precision ranging, component metrology, and ...

49. Fast high-resolution frequency agile spectroscopy of laser sources
Topic: Optical Metrology
Published: 10/24/2010
Authors: Fabrizio Raphael Giorgetta, Ian R Coddington, Esther Baumann, William C Swann, Nathan Reynolds Newbury
Abstract: Time-resolved, high-accuracy and high-resolution spectroscopy of frequency-agile cw lasers is critical to realizing their full potential for sensing, but is not possible with conventional spectroscopy methods. We demonstrate a dual comb-based spectro ...

50. Monitoring Photothermally Excited Nanoparticles via Multimodal Microscopy
Topic: Optical Metrology
Published: 5/19/2010
Authors: Matthew Lawrence Clarke, Shin G. Chou, Jeeseong Hwang
Abstract: Generation of heat using optically excited nanoparticles can be beneficial or detrimental depending on the application. Therefore, clinically applicable studies are being pursued in an effort to achieve safe practices of nanoparticle-induced hyperth ...

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