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You searched on: Topic Area: Optical Metrology

Displaying records 31 to 40 of 73 records.
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31. 3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization
Topic: Optical Metrology
Published: 3/25/2013
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Ronald G Dixson, Richard M Silver
Abstract: Reduced target dimensions requiring improved resolution and sensitivity have driven the need to use and analyze the phase and scattered frequency information available when using image-based scatterometry systems. One such system is scatterfield micr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912961

32. SCATTERFIELD MICROSCOPY, REVIEW OF TECHNIQUES THAT PUSH THE FUNDAMENTAL LIMITS OF OPTICAL DEFECT METROLOGY
Topic: Optical Metrology
Published: 3/25/2013
Authors: Richard M Silver, Bryan M Barnes, Francois R. Goasmat, Hui Zhou, Martin Y Sohn
Abstract: The semiconductor manufacturing industry is now facing serious challenges in achieving defect detection rates with acceptable throughput and accuracy. With conventional bright-field and dark- field inspection methods now at their limits, it has b ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913246

33. Accurate, inexpensive testing of handheld lasers for safe use and operation
Topic: Optical Metrology
Published: 3/7/2013
Authors: Marla L Dowell, Joshua Aram Hadler
Abstract: An accurate, inexpensive test bed for measurements of optical power emitted from handheld lasers is described. Our test bed consists of a thermopile detector, bandpass optical filters, an adjustable iris, and self-centering holders for mounting of th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912781

34. Standardization of Broadband UV Measurements
Topic: Optical Metrology
Published: 1/1/2013
Author: George P Eppeldauer
Abstract: The CIE standardized rectangular-shape UV response functions can be realized only with large spectral mismatch errors. The spectral power-distribution of UV sources is not standardized. Accordingly, the readings of different types of UV meters, even ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913173

35. Adaptive measurements in nonorthogonal state discrimination
Topic: Optical Metrology
Published: 12/18/2012
Authors: Francisco E. Becerra Chavez, Alan L Migdall
Abstract: Adaptive measurements represent important resources in quantum information science and quan- tum technologies. They take advantage of the knowledge of partial measurements of the system to optimize subsequent measurements and perform tasks that are ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912397

36. Nanoscale Specific Heat Capacity Measurements Using Optoelectronic Bilayer Microcantilevers
Topic: Optical Metrology
Published: 12/12/2012
Authors: Brian G. (Brian Gregory) Burke, William A Osborn, Richard Swift Gates, David A LaVan
Abstract: We describe a new technique for optically and electrically detecting and heating bilayer microcantilevers (Pt−SiNx) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The bilayer microcantilever acts s ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912233

37. Weak value thermostat with 0.2 mK precision
Topic: Optical Metrology
Published: 12/1/2012
Authors: Patrick F Egan, Jack A Stone Jr.
Abstract: A new laser-based thermostat sensitive to 0.2 mK at room temperature is reported. The method utilizes a fluid-filled prism and interferometric weak value amplification to sense nanoradian deviations of a laser beam: due to the high thermooptic coef ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912232

38. Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
Topic: Optical Metrology
Published: 10/11/2012
Authors: Jing Qin, Hui Zhou, Bryan M Barnes, Francois R. Goasmat, Ronald G Dixson, Richard M Silver
Abstract: There has been much recent work in developing advanced optical metrology applications that use imaging optics for optical critical dimension (OCD) measurements, defect detection, and for potential use with in-die metrology applications. We have previ ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912169

39. Measuring Single-Walled Carbon Nanotube Length Distributions from Diffusional Trajectories
Topic: Optical Metrology
Published: 8/27/2012
Authors: Jason Streit, Sergei M Bachilo, Anton V Naumov, Constantine Y. Khripin, Ming Zheng, R Bruce Weisman
Abstract: A new method is demonstrated for measuring the length distributions of dispersed single-walled carbon nanotube (SWCNT) samples by analyzing diffusional motions of many individual nanotubes in parallel. In this method, termed Length Analysis by Na ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911770

40. Coupled-cavity ring-down spectroscopy technique
Topic: Optical Metrology
Published: 8/6/2012
Authors: Jeremie B. Courtois, Joseph Terence Hodges
Abstract: We present a technique called coupled-cavity ring-down spectroscopy (CC-RDS) for controlling the finesse of an optical resonator. Applications include extending the sensitivity and dynamic range of a cavity-enhanced spectrometer, as well as widening ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911352



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