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Topic Area: Nanofabrication, Nanomanufacturing, and Nanoprocessing
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Displaying records 11 to 20 of 98 records.
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11. Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 8/15/2012
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 De ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911431

12. Design of an on-chip microscale nanoassembly system
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 2/10/2009
Authors: Jason John Gorman, Yong Sik Kim, Andras Vladar, Nicholas G Dagalakis
Abstract: A microscale nanoassembly system has been designed for the fabrication of nanodevices and in situ electromechanical characterisation of nanostructures. This system consists of four Microelectromechanical Systems(MEMS)-based nanomanipulators positione ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901179

13. Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for SOI-MEMS Applications
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 5/3/2012
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: This paper presents the design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator based on MEMS (Micro-Electro-Mechanical System). The proposed electrothermal actuator is designed to generate motions along the ou ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910830

14. Developments in nano-oscillators based upon spin-transfer point-contact devices
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 12/31/2007
Authors: Thomas J Silva, William H Rippard
Abstract: We review the current status of research on microwave nano-oscillators that utilize spin transfer devices with point-contact geometry, with an emphasis on the open questions that still prevent our full understanding of device properties. In particula ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32791

15. Does Your SEM Really Tell the Truth? Part 2
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The first paper in this series, discussed some of the issues related to signal generat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913866

16. Effect of resist on the transfer of line-edge roughness spatial metrics from mask to wafer
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 11/11/2010
Authors: Patrick P Naulleau, Gregg M. Gallatin
Abstract: Mask contributors to line-edge roughness (LER) have recently been shown to be an issue of concern for both the accuracy of current resist evaluation tests as well the ultimate LER requirements for the 22 nm production node. More recently, it has been ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905544

17. Effects of shape distortions and imperfections on mode frequencies and collective linewidths in nanomagnets
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/28/2011
Authors: Hans Toya Nembach, Justin M Shaw, Thomas J Silva, Ward L Johnson, Sudook A Kim, Robert D McMichael, Pavel Kabos
Abstract: We used Brillouin light scattering to show that shape distortions in Ni80Fe20 nanoelements can have a dramatic effect on the measured linewidth of certain modes. By intentionally introducing an amount of ,egg-likeŠ shape distortion to an ideal ellip ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907044

18. Engineered Microfluidic and Nanofluidic Device Metrology
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/22/2010
Author: Samuel M Stavis
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907060

19. Fabricating Nanostructures Using Optical Forces on Atoms
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 1/1/1994
Authors: R Gupta, R E. Scholten, Jabez J McClelland, Robert Celotta
Abstract: We have demonstrated the use of the optical dipole force in a standing wave to focus chromium atoms into narrow lines as they deposit onto a silicon substrate. An array of chromium lines has been fabricated, with width of 65 nm and spacing of 213 nm ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620440

20. Fabrication and characterization of nanostructured III-V thermoelectric materials
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/26/2013
Authors: Clint Joseph Novotny, Fred Sharifi
Abstract: Approximately two thirds of all fossil fuel used is lost as heat. Thermoelectric materials, which convert heat into electrical energy, may provide a solution to partially recover some of this lost energy. To date, most commercial thermoelectric mater ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914496



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