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Topic Area: Nanofabrication, Nanomanufacturing, and Nanoprocessing
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Displaying records 71 to 80 of 98 records.
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71. Surface Growth in Laser-Focused Atomic Deposition
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 7/15/1999
Authors: E Jurdik, T Rasing, K van, C Bradley, Jabez J McClelland
Abstract: We present calculations of surface growth in laser-focused nanostructure fabrication. We show that theoretical predictions of the structure profile s shape depend sensitively on the model used to describe the growth, and also on the parameters chose ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620511

72. Atom Optics: Using Light to Position Atoms
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 5/19/1999
Authors: Jabez J McClelland, M Prentiss
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620450

73. Patterning of Octadecylsiloxane Self-assembled Monolayers on Si(100) using Ar(^u3^P^d0^,2) Atoms
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 5/1/1999
Authors: Shannon Bradley Hill, C Haich, F Dunning, G Walters, Jabez J McClelland, Robert Celotta, H Craighead, J Han, D Tannenbaum
Abstract: ^u^^d^ We report the use of metastable (Ar^u3^P^d0,2^) atoms and a physical mask to pattern octadecylsiloxane self-assembled monolayers grown directly onsilicon surfaces. The damage to the monolayer is confirmed using lateral force microscopy, change ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620509

74. Minimizing Feature Width in Atom-Optically Fabricated Chromium Nanostructures
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/1/1999
Authors: W Anderson, C Bradley, Jabez J McClelland, Robert Celotta
Abstract: We present a study of factors that influence the feature width of nanostructures formed by atom-optical direct-write lithography. In this process, chromium atoms travel through a standing-wave laser light field and are deposited on a surface. Due ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620498

75. Nanofabrication via Atom Optics
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 2/23/1999
Authors: C Bradley, W Anderson, Jabez J McClelland, Robert Celotta
Abstract: Owing to the continuing reduction in the scale of microelectronic and micromagnetic technology, new microfabrication methods are constantly being explored. This is particularly true in the case of nanostructure fabrication. Here, the phenomenon of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620502

76. Atoms join in the race for lithography in the next century
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 1/1/1998
Author: Jabez J McClelland
Abstract: A news story is presented describing recent experiments on lithography using laser-controlled metastable rare gas atoms.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620495

77. Nanostructure Fabrication by Reactive-ion Etching of Laser-Focused Chromium on Silicon
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 1/1/1998
Authors: Jabez J McClelland, R Gupta, Robert Celotta, G Porkolab
Abstract: We have fabricated chromium nanostructures on silicon by laser-focused atomic deposition, and have further processed these structures by reactive-ion etching in an SF^d6^ plasma. We show that the result can be an array of parallel wires as narrow as ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620488

78. Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic Beam Imaging
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/1/1997
Authors: A Bard, K K Berggren, J L Wilbur, John D Gillaspy, S L. Rolston, Jabez J McClelland, William D Phillips, M Prentiss, G M Whitesides
Abstract: We used a beam of noble gas atoms in a metastable excited state to expose a thin (1.5nm self-assembled monolayer resist applied over a gold-coated silicon wafer. We determined exposure damage as a function of dose of metastable atoms by processing t ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101919

79. Nanofabrication via Atom Optics with Chromium
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 2/10/1997
Authors: Jabez J McClelland, W Anderson, Robert Celotta
Abstract: Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each no ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620481

80. Replica Molding Using Polymeric Materials: A Practical Step Toward Nanomanufacturing
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 2/1/1997
Authors: Y Xia, Jabez J McClelland, R Gupta, D Qin, Xuezeng Zhao, L Sohn, Robert Celotta, G M Whitesides
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=620479



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