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You searched on: Topic Area: Nanofabrication, Nanomanufacturing, and Nanoprocessing Sorted by: date

Displaying records 11 to 20 of 47 records.
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11. Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/2/2014
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Richard M Silver, Andras Vladar, Abraham Arceo
Abstract: We have previously introduced a new data analysis method that more thoroughly utilizes scattered optical intensity data collected during defect inspection using bright-field microscopy. This volumetric approach allows conversion of focus resolved 2-D ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915807

12. Controlled Formation and Characterization of Dithiothreitol-Conjugated Gold Nanoparticle Clusters
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/5/2014
Authors: De-Hao D. Tsai, Tae Joon Cho, Frank W DelRio, Justin M Gorham, Jiwen Zheng, Jiaojie Tan, Michael Russel Zachariah, Vincent A Hackley
Abstract: We report a systematic study of the controlled formation of discrete-size gold nanoparticle clusters (GNCs) by interaction with the reducing agent dithiothreitol (DTT). Asymmetric-flow field flow fractionation and electrospray differential mobility a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915014

13. Strong Casimir force reduction by metallic surface nanostructuring
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/27/2013
Authors: Francesco Intravaia, Stefan T. Koev, Il Woong Jung, Albert A. Talin, Paul S Davids, Ricardo Decca, Vladimir A Aksyuk, Diego A. R. Dalvit, Daniel Lopez
Abstract: The Casimir force is a quantum-mechanical interaction arising from vacuum fluctuations of the electromagnetic (EM) field and is technologically significant in micro- and nanomechanical systems. Despite rapid progress in nanophotonics, the goal of e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910133

14. Block-copolymer healing of simple defects in a chemoepitaxial template
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/11/2013
Authors: Paul N Patrone, Gregg M. Gallatin
Abstract: Using a phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. The model, which is an extension of the Leibler-Ohta-Kawasaki theory, accoun ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913545

15. The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/29/2013
Authors: Liya Yu, Richard J Kasica, Robert Dennis Newby, Lei Chen, Vincent K Luciani
Abstract: This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of photol ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913677

16. Temperature-dependent mechanical-resonance frequencies and damping in ensembles of gallium nitride nanowires
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 10/22/2012
Authors: Kristine A Bertness, Norman A Sanford, J. R. Montague, H.S. Park, Victor M. Bright, C. T. Rogers
Abstract: We have measured singly clamped cantilever mechanical-resonances in ensembles of as-grown gallium nitridenanowires (GaN NWs), from 12 K to 320 K. Resonance frequencies are approximately linearly dependent on temperature near 300 K ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910038

17. On CD-AFM bias related to probe bending
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/9/2012
Authors: Vladimir A Ukraintsev, Ndubuisi George Orji, Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Richard M Silver
Abstract: Critical Dimension AFM (CD-AFM) is a widely used reference metrology. To characterize modern semiconductor devices, very small and flexible probes, often 15 nm to 20 nm in diameter, are now frequently used. Several recent publications have reported ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910903

18. Nanometrology Using Through-Focus Scanning Optical Microscopy Method
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 12/21/2011
Authors: Ravikiran Attota, Richard M Silver
Abstract: We present an initial review of a novel through-focus scanning optical microscopy (TSOM) imaging method that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope. In the TSOM method a target is ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905395

19. Structural and electrical properties of Flip Chip Laminated metal-molecule-silicon structures modifying molecular backbone and atomic tether
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 10/19/2011
Authors: Mariona Coll Bau, Nadine Emily Gergel-Hackett, Curt A Richter, Christina Ann Hacker
Abstract: The formation of electrical contacts on organic molecules preserving their integrity and using a scalable technique is a key step toward the fabrication of molecular electronic devices. Here we study the structural and electrical properties of metal- ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906090

20. GaN Nanowires Grown by Molecular Beam Epitaxy
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 8/1/2011
Authors: Kristine A Bertness, Norman A Sanford, Albert Davydov
Abstract: The unique properties of GaN nanowires grown by molecular beam epitaxy are reviewed. These properties include the absence of residual strain, exclusion of most extended defects, long photoluminescence lifetime, low surface recombination velocity,and ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909502



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