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Topic Area: Nanofabrication, Nanomanufacturing, and Nanoprocessing

Displaying records 1 to 10 of 96 records.
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1. Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/2/2014
Authors: Bryan M Barnes, Francois R. (Francois) Goasmat, Martin Y Sohn, Hui Zhou, Richard M Silver, Andras Vladar, Abraham Arceo
Abstract: We have previously introduced a new data analysis method that more thoroughly utilizes scattered optical intensity data collected during defect inspection using bright-field microscopy. This volumetric approach allows conversion of focus resolved 2-D ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915807

2. Does Your SEM Really Tell the Truth? Part 2
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The first paper in this series, discussed some of the issues related to signal generat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913866

3. Strong Casimir force reduction by metallic surface nanostructuring
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/27/2013
Authors: Francesco Intravaia, Stefan T. Koev, Il Woong Jung, Albert A. Talin, Paul S Davids, Ricardo Decca, Vladimir A Aksyuk, Diego A. R. Dalvit, Daniel Lopez
Abstract: The Casimir force is a quantum-mechanical interaction arising from vacuum fluctuations of the electromagnetic (EM) field and is technologically significant in micro- and nanomechanical systems. Despite rapid progress in nanophotonics, the goal of e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910133

4. Fabrication and characterization of nanostructured III-V thermoelectric materials
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 9/26/2013
Authors: Clint Joseph Novotny, Fred Sharifi
Abstract: Approximately two thirds of all fossil fuel used is lost as heat. Thermoelectric materials, which convert heat into electrical energy, may provide a solution to partially recover some of this lost energy. To date, most commercial thermoelectric mater ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914496

5. Block-copolymer healing of simple defects in a chemoepitaxial template
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 4/11/2013
Authors: Paul Nathan Patrone, Gregg M. Gallatin
Abstract: Using a phase-field model of block copolymers (BCPs), we characterize how a chemoepitaxial template with parallel lines of arbitrary width affects the BCP microdomain shape. The model, which is an extension of the Leibler-Ohta-Kawasaki theory, accoun ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913545

6. The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/29/2013
Authors: Liya Yu, Richard J Kasica, Robert Dennis Newby, Lei Chen, Vincent K Luciani
Abstract: This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of photol ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913677

7. Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 3/26/2013
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage is presented based on bulk mic ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913234

8. Quantum Dot-DNA Origami Binding : A Single Particle, 3D, Real-Time Tracking Study
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 1/2/2013
Authors: Kan K. Du, Seung-Hyeon Ko, Gregg M. Gallatin, Heayoung Yoon, James Alexander Liddle, Andrew J. Berglund
Abstract: The binding process of quantum dots and DNA origami was monitored using a 3D, real-time, single-particle tracking system. Single-molecule binding events were directly observed and precise measurements of the diffusion coefficient and second-order pho ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912604

9. Design and Fabrication of a Three-DoF MEMS Stage Based on Nested Structures
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 8/15/2012
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: This paper presents the design, fabrication and testing of a Micro Electro Mechanical Systems (MEMS) based positioning stage which is capable of generating translational motions along X, Y and Z axes, respectively. For this purpose, two existing 1 De ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911431

10. Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures
Topic: Nanofabrication, Nanomanufacturing, and Nanoprocessing
Published: 5/29/2012
Authors: Craig Dyer McGray, Richard J Kasica, Ndubuisi George Orji, Ronald G Dixson, Michael W Cresswell, Richard A Allen, Jon C Geist
Abstract: A robust technique is presented for auto-aligning nanostructures to slow-etching crystallographic planes in materials with diamond cubic structure. Lithographic mask patterns are modified from the intended dimensions of the nanostructures to compen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908076



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