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You searched on: Topic Area: Characterization, Nanometrology, and Nanoscale Measurements Sorted by: title

Displaying records 31 to 40 of 158 records.
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31. Dimensional Analysis of Through Silicon Vias Using the TSOM Method
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 7/12/2011
Authors: Ravikiran Attota, Andrew Rudack
Abstract: There is a great need for accurate, truly-3D metrology solutions that can be used for analysis of high aspect ratio features such as through-silicon-vias (TSVs). Through-focus scanning optical microscopy (TSOM) is an optical metrology method that pr ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909226

32. Direct evidence of active and inactive phases of Fe catalyst nanoparticles for carbon nanotube formation
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 11/1/2014
Authors: Stefano Mazzuccoo, Ying Wang, Mihaela M. Tanase, Matthieu C. Picher, Kai Li, Zhijian WU, Stephan Irle, Renu Sharma
Abstract: Iron and carbon interactions play an important role in various industrial processes such as steel manufacturing, liquid fuel the production by Fischer Tropsch process and carbon nanotube synthesis by chemical vapor deposition process. Interestingly, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914905

33. Direct observation of nucleation and early stages of growth of GaN nanowires
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 2/15/2012
Authors: Rosa E. Diaz, Renu Sharma, Karalee Jarvis, Qinglei Zhang, Subhash Mahajan
Abstract: We report for the first time direct observations of the nucleation and early stages of growth of GaN nanowires. The nanowires were formed by exposing Au + Ga droplets to ammonia. The formation process was observed in situ, and controlled in real time ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906318

34. Dispersion Stability of Nanoparticles in Ecotoxicological Investigations: A Comparison of Different Techniques
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 2/26/2011
Authors: Ratna Tantra, Shingheng Jing, Siva Kaliyappan, Nicholas Walker, James Noble, Vincent A Hackley
Abstract: One of the main challenges in nanoecotoxicological investigations is in the selection of the most suitable measurement methods and protocols for nanoparticle characterisation. Several parameters have been identified as being important as they govern ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906180

35. Dynamics and Free Energy of Polymers Partitioning into a Nanoscale Pore
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 12/1/1997
Authors: S. M. Bezrukov, I Vodyanoy, R A Brutyan, J. J. Kasianowicz
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100220

36. Electron beam heating effects during ESEM imaging of water condensation on superhydrophobic surfaces
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/1/2011
Authors: Konrad Rykaczewski, John Henry j Scott, Andrei G. Fedorov
Abstract: Nanostructured superhydrophobic surfaces show promise as promoters of dropwise condensation and may lead to significant efficiency improvements in numerous industrial processes. Droplets with diameters below ~10 µm account for the majority of the he ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907573

37. Electron beam induced current in the high injection regime
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 7/2/2015
Authors: Paul M Haney, Heayoung Yoon, Prakash Koirala, Robert W. Collins, Nikolai B Zhitenev
Abstract: Electron beam induced current (EBIC) is a powerful technique which measures the charge collection efficiency of photovoltaics with sub-micron spatial resolution. The exciting electron beam results in a high generation rate density of electron-hole ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=917436

38. Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/4/2016
Authors: Bryan M Barnes, Mark Alexander Henn, Martin Y Sohn, Hui Zhou, Richard M Silver
Abstract: Dimensional scaling trends will eventually bring the semiconductor critical dimensions (CDs) down to only a few atoms in width. New optical techniques are required to address intra-die variability for these CDs using sufficiently small in-die metrolo ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=920551

39. Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/10/2013
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Abraham Arceo
Abstract: To measure the new SEMATECH 9 nm node Intentional Defect Array (IDA) and subsequent small, complex defects, a methodology has been used to exploit the rich information content generated when simulating or acquiring several images of sub-wavelength-si ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913542

40. Establishing an upper bound on contact resistivity of ohmic contacts to n-GaN nanowires
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/1/2014
Authors: Paul T Blanchard, Kristine A Bertness, Todd E Harvey, Norman A Sanford
Abstract: Contact resistivity {rho}^dc^ is an important figure of merit in evaluating and improving the performance of electronic and optoelectronic devices. Due to the small size, unique morphology, and uncertain transport properties of semiconductor nano ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914876



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