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Topic Area: Characterization, Nanometrology, and Nanoscale Measurements
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Displaying records 151 to 160 of 199 records.
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151. Robust Elemental Mapping of Nanostructures at Ultrahigh Resolution using Event-Streamed Spectrum Imaging in an Aberration-Corrected Analytical Electron Microscope
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/1/2013
Authors: Andrew A Herzing, Ian M. Anderson
Abstract: We detail the application of X-ray energy dispersive spectroscopy (XEDS) event-streamed spectral imaging (ESSI) in an aberration-corrected analytical electron microscope (AEM) as a reliable method for the acquisition of ultra-high spatial resolution ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910229

152. SCATTERFIELD MICROSCOPY, REVIEW OF TECHNIQUES THAT PUSH THE FUNDAMENTAL LIMITS OF OPTICAL DEFECT METROLOGY
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/25/2013
Authors: Richard M Silver, Bryan M Barnes, Francois R. Goasmat, Hui Zhou, Martin Y Sohn
Abstract: The semiconductor manufacturing industry is now facing serious challenges in achieving defect detection rates with acceptable throughput and accuracy. With conventional bright-field and dark- field inspection methods now at their limits, it has b ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913246

153. Scanning Tunneling Microscopy of Gate Tunable Topological Insulator Bi2Se3 Thin Films
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/12/2013
Authors: Tong Zhang, Niv Levy, Jeonghoon Ha, Young Kuk, Joseph A Stroscio
Abstract: Electrical field control of the carrier density of topological insulators (TI) has greatly expanded the possible practical use of these materials. However, the combination of low temperature local probe studies and a gate tunable TI device remains c ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913044

154. Scatterfield Microscopy of 22 nm Node Patterned Defects using Visible and DUV Light
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/4/2012
Authors: Bryan M Barnes, Martin Y Sohn, Francois R. Goasmat, Hui Zhou, Richard M Silver, Abraham Arceo
Abstract: Smaller patterning dimensions and novel architectures are fostering research into improved methods of defect detection in semiconductor device manufacturing. This initial experimental study, augmented with simulation, evaluates scatterfield microscop ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910963

155. Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 12/9/2008
Authors: Heather J Patrick, Thomas Avery Germer, Yifu Ding, Hyun W. Ro, Lee J Richter, Christopher Soles
Abstract: We use optical scatterometry to extract the time evolution of the profile of nanoimprinted lines in low and high molecular mass polymer gratings during reflow at the glass transition temperature. The data are obtained continuously during the anneal ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=900878

156. Separation and Metrology of Nanoparticles by Nanofluidic Size Exclusion
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 8/11/2010
Authors: Samuel M Stavis, Jon C Geist, Michael Gaitan
Abstract: A nanofluidic approach to the separation and metrology of nanoparticles is demonstrated. Advantages of this approach include nanometer-scale resolution, nanometer-scale to submicrometer-scale range, mitigation of hydrodynamic and diffusional limitat ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904215

157. Shell and ligand-dependent blinking of CdSe-based core/shell nanocrystals
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 7/7/2010
Authors: Bonghwan Chon, Sung Jun Lim, Wonjung Kim, Hyeong Gon Kang, Taiha Joo, Jeeseong Hwang, Seung Koo Shin
Abstract: Blinking of zinc blende CdSe-based core/shell nanocrystals is studied as a function of shell materials and surface ligands. CdSe/ZnS, CdSe/ZnSe/ZnS and CdSe/CdS/ZnS core/shell nanocrystals are prepared by colloidal synthesis and six monolayers of lar ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903812

158. Silicon-based Molecular Electronics in the Post-Hype Era
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/8/2011
Author: Christina Ann Hacker
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908431

159. Single molecule confocal fluorescence lifetime correlation spectroscopy for accurate nanoparticle size determination
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/15/2014
Authors: Bonghwan Chon, Kimberly A Briggman, Jeeseong Hwang
Abstract: We report on an experimental procedure in confocal single molecule fluorescence lifetime correlation spectroscopy (FLCS) to determine the range of excitation power and molecule concentration in solution under which the application of an unmodified ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914381

160. Size Measurement of Nanoparticles using Atomic Force Microscopy
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 10/1/2009
Authors: Jaroslaw Grobelny, Frank W DelRio, Pradeep Narayanan Namboodiri, Doo-In Kim, Vincent A Hackley, Robert Francis Cook
Abstract: In this assay protocol, procedures for dispersing gold nanoparticles on various surfaces such that they are suitable for imaging and height measurement via intermittent contact mode AFM are first described. The procedures for AFM calibration and ope ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854085



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