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You searched on: Topic Area: Characterization, Nanometrology, and Nanoscale Measurements Sorted by: title

Displaying records 111 to 120 of 128 records.
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111. Structure Characterization of Nanoporous Interlevel Dielectric Thin Films With X-Ray and Neutron Radiation
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/6/2007
Authors: Christopher L Soles, Hae-Jeong Lee, B D. Vogt, Eric K Lin, Wen-Li Wu
Abstract: The structure characterization of nanoporous interlevel dielectric (ILD) thin films is challenging because of the small sample volumes and nanometer dimensions of the pores. In this chapter, we review characterization methods for porous ILD material ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852526

112. Subsurface Characterization of Carbon Nanotubes in Polymer Composites via Quantitative Electric Force Microscopy
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 2/3/2010
Authors: Minhua Zhao, Xiaohong Gu, Sharon E. Lowther, Cheol Park, Jerry Jean, Tinh Nguyen
Abstract: In this study, quantitative Electric Force Microscopy (EFM) characterization of CNTs dispersed in free-standing polymer composite films is pursued. The effect of experimental parameters including humidity conditions, EFM probe geometry, tip-sample ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904262

113. Surface Chemical Transformations of UV irradiated Silica-Epoxy Nanocomposites
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/15/2013
Authors: Justin M Gorham, Tinh Nguyen, Deborah L Stanley, Coralie Bernard, Richard D Holbrook
Abstract: Silica nanoparticles (SiNPs) incorporated into a polymeric matrix, or silica nanocomposites (SiNCs), are used in a wide variety of commercially available products in numerous natural and artificial environments. Environmental factors, such as light, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913534

114. TSOM Method for Nanoelectronics Dimensional Metrology
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 11/18/2011
Author: Ravikiran Attota
Abstract: Through-focus scanning optical microscopy (TSOM) is a relatively new method that transforms conventional optical microscopes into truly three-dimensional metrology tools for nanoscale to microscale dimensional analysis. TSOM achieves this by acquirin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908623

115. TSOM Method for Semiconductor Metrology
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/18/2011
Authors: Ravikiran Attota, Ronald G Dixson, John A Kramar, James Edward Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical microscopes; measurement sensitivities are comparable to what is typical using Scatterometry, SEM ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908177

116. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/30/2013
Authors: Ravikiran Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913667

117. Temperature-Programmed Electrospray-Differential Mobility Analysis for Characterization of Ligated Nanoparticles in Complex Media
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 8/12/2013
Authors: De-Hao D. Tsai, Frank W DelRio, John M Pettibone, Pin Ann Lin, Jiaojie Tan, Michael Russel Zachariah, Vincent A Hackley
Abstract: In this study, an electrospray-differential mobility analyzer (ES-DMA) was operated with an aerosol flow-mode, temperature-programmed approach to enhance its ability to characterize the particle size distributions (PSDs) of nanoscale particles (NPs) ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913860

118. Temperature-dependent mechanical-resonance frequencies and damping in ensembles of gallium nitride nanowires
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 10/22/2012
Authors: Kristine A Bertness, Norman A Sanford, J. R. Montague, H.S. Park, Victor M. Bright, C. T. Rogers
Abstract: We have measured singly clamped cantilever mechanical-resonances in ensembles of as-grown gallium nitridenanowires (GaN NWs), from 12 K to 320 K. Resonance frequencies are approximately linearly dependent on temperature near 300 K ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910038

119. Three dimensional aspects of droplet coalescence during dropwise condensation on superhydrophobic surfaces
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 8/24/2011
Authors: Konrad Rykaczewski, John Henry j Scott, Sukumar Rajauria, W Robert Ashurst, Jeff Chinn, Amy Chinn, Wanda Jones
Abstract: We report formation of nano-to-microscale satellite droplets in the geometrical shadow of high contact angle primary drops during dropwise water condensation on a nanostructured superhydrophobic surface. The primary drops contribute to the heat tran ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908846

120. Three-dimensional Nanometrology with TSOM Optical Method
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 12/10/2011
Author: Ravikiran Attota
Abstract: Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement sensitivity using conventional optical microscopes; measurement sensitivities are comparable to what is typical when using scatterometry ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910045



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