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You searched on: Topic Area: Characterization, Nanometrology, and Nanoscale Measurements Sorted by: date

Displaying records 31 to 40 of 125 records.
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31. Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 6/7/2013
Authors: Ravikiran Attota, Benjamin D. Bunday, Victor Vertanian
Abstract: We present results using simulations and experiments to demonstrate metrological applications of the through-focus scanning optical microscopy (TSOM) down to features at and well below the International Technology Roadmap for Semiconductors' 22  ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913353

32. Preparation of Nanoscale TiO2 Dispersions in an Environmental Matrix for Eco-Toxicological Assessment
Series: Special Publication (NIST SP)
Report Number: 1200-5r1
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 6/3/2013
Authors: Julian S. Taurozzi, Vincent A Hackley, Mark R Wiesner
Abstract: Toxicity and fate assessment are key elements in the evaluation of the environmental, health and safety risks of engineered nanomaterials (ENMs). While significant effort and resources have been devoted to the toxicological evaluation of many ENMs, i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913712

33. ,Real-worldŠ precision, bias, and between-laboratory variation for surface area measurement of a titanium dioxide nanomaterial in powder form
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 6/1/2013
Authors: Vincent A Hackley, Aleksandr B. Stefaniak
Abstract: Accurate characterization of nanomaterial properties is a critical component of any nanotoxicology testing strategy. Data that describes the performance of various laboratories to measure the characteristics of the same nanomaterial is scarce. We c ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912937

34. Nanofluidic Entropophoresis
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/29/2013
Authors: Samuel M Stavis, Elizabeth A Strychalski
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913873

35. Size-independent effects on nanoparticle retention behavior in asymmetric flow field-flow fractionation
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/29/2013
Authors: Julien C. Gigault, Vincent A Hackley
Abstract: In this work we highlight the size-independent influence of the material properties of nanoparticles on their retention behavior in asymmetric-flow field-flow fractionation (A4F). The phenomena described here suggest there are limits to the effec ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913433

36. General Analysis of Microwave Network Scattering Parameters for Characterization of Thin Film Material
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/21/2013
Author: Jan Obrzut
Abstract: A general solution of the linear passive microwave network is presented, for the characterization of thin film materials at high microwave frequencies. The mathematical formulas that correlate scattering parameters S11 and S21 with the distributed ci ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910675

37. Surface Chemical Transformations of UV irradiated Silica-Epoxy Nanocomposites
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/15/2013
Authors: Justin M Gorham, Tinh Nguyen, Deborah L Stanley, Coralie Bernard, Richard D Holbrook
Abstract: Silica nanoparticles (SiNPs) incorporated into a polymeric matrix, or silica nanocomposites (SiNCs), are used in a wide variety of commercially available products in numerous natural and artificial environments. Environmental factors, such as light, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913534

38. Quantitative Analysis of Dendron-Conjugated Cisplatin-Complexed Gold Nanoparticles Using Scanning Particle Mobility Mass Spectrometry
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 5/8/2013
Authors: De-Hao D. Tsai, Tae Joon Cho, Sherrie R. Elzey, Julien C. Gigault, Vincent A Hackley
Abstract: We report a high-resolution and traceable method to quantify the drug loading on nanoparticle-based cancer therapeutics, and demonstrate this method using a model cisplatin functionalized dendron-gold nanoparticle (AuNP) conjugate. Electrospray diffe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912782

39. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/30/2013
Authors: Ravikiran Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913667

40. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913698



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