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You searched on: Topic Area: Statistics

Displaying records 1 to 10 of 25 records.
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1. Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
Topic: Statistics
Published: 11/12/2015
Authors: Mark Alexander Henn, Richard M Silver, John S Villarrubia, Nien F Zhang, Hui Zhou, Bryan M Barnes, Andras Vladar, Bin Ming
Abstract: Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimat ...

2. Ensemble Neural Network Model for Predicting the Energy Consumption of a Milling Machine
Topic: Statistics
Published: 7/31/2015
Authors: Ronay Ak, Moneer M Helu, Sudarsan Rachuri
Abstract: Accurate prediction of the energy consumption is critical for energy-efficient production systems. However, the majority of the existing prediction models aim at providing only point predictions and can be affected by the uncertainties in the mod ...

3. Use of Bayesian Statistics to Improve Optical Measurement Uncertainty by Combined Multi-Tool Metrology
Topic: Statistics
Published: 6/25/2015
Authors: Nien F Zhang, Richard M Silver, Hui Zhou, Bryan M Barnes
Abstract: Recently, there has been significant research investigating new optical technologies for dimensional metrology of features 32 nm in critical dimension and smaller. When modeling optical measurements a library of curves is assembled through the simula ...

4. The Axes of Random Infinitesimal Rotations and the Propagation of Orientation Uncertainty
Topic: Statistics
Published: 5/5/2015
Authors: Marek Franaszek, Mili Shah, Geraldine S Cheok, Kamel S Saidi
Abstract: Perception systems can measure the orientation of a solid 3D object; however, their measurements will contain some uncertainties. In many robotic applications, it is important to propagate the orientation uncertainties of a rigid object onto the unce ...

5. Experimental Bounds on Classical Random Field Theories
Topic: Statistics
Published: 12/10/2014
Authors: Joffrey Kent Peters, Sergey V Polyakov, Jingyun Fan, Alan L Migdall
Abstract: Alternative theories to quantum mechanics motivate important fundamental tests of our understanding and description of the smallest physical systems. Here we place experimental limits on those classical field theories which result in power-depend ...

6. On Statistical Modeling and Forecasting of Energy Usage in Smart Grid
Topic: Statistics
Published: 10/8/2014
Authors: Wei Yu, Dou An, David Wesley Griffith, Qingyu Yang, Guobin Xu
Abstract: Developing effective energy resource management in the smart grid is challenging because the entities in both the demand and supply sides experience various uncertainties. This paper addresses the issue of quantifying uncertainties on the energy ...

7. Pairwise Alignment of Chromatograms using a Fisher-Rao Metric
Topic: Statistics
Published: 9/2/2014
Authors: William E Wallace III, Anuj Srivastava, Kelly H Telu, Yamil Simon
Abstract: A new approach to aligning chromatograms is introduced and applied to examples of metabolite identification by liquid chromatography mass spectrometry (LC MS). A square root representation of the chromatogram‰s derivative coupled with a Fisher Rao R ...

8. Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
Topic: Statistics
Published: 4/14/2014
Authors: Richard M Silver, Bryan M Barnes, Nien F Zhang, Hui Zhou, Andras Vladar, John S Villarrubia, Regis J Kline, Daniel Franklin Sunday, Alok Vaid
Abstract: There has been significant interest in hybrid metrology as a novel method for reducing overall measurement uncertainty and optimizing measurement throughput (speed) through rigorous combinations of two or more different measurement techniques into a ...

9. Bootstrap Variability Studies in ROC Analysis on Large Datasets
Topic: Statistics
Published: 3/19/2014
Authors: Jin Chu Wu, Alvin Martin, Raghu N Kacker
Abstract: The nonparametric two-sample bootstrap is employed to compute uncertainties of measures in receiver operating characteristic (ROC) analysis on large datasets in areas such as biometrics, and so on. In this framework, the bootstrap variability was emp ...

10. An Integrated Detection System Against False Data Injection Attacks in the Smart Grid
Topic: Statistics
Published: 3/4/2014
Authors: Wei Yu, David Wesley Griffith, Linqiang Ge, Sulabh Bhattarai, Nada T Golmie
Abstract: The smart grid is a new type of power grid that will use the advanced communication network technologies to support more efficient energy transmission and distribution. The grid infrastructure was designed for reliability; but security, especiall ...

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