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Topic Area: Nanomanufacturing
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Displaying records 51 to 60 of 73 records.
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51. OPTIMIZING GAUSSIAN FILTER LONG WAVELENGTH CUTOFF »c FOR IMPROVING 3D BALLISTICS SIGNATURE CORRELATIONS
Topic: Nanomanufacturing
Published: 10/19/2008
Authors: Jun-Feng Song, Li Ma, Theodore Vincent Vorburger, Susan M Ballou
Abstract: In the ballistics measurements and correlations, optimum selection of c has particular importance for an unambiguous extraction of Individual Characteristics from the Class Characteristics . Poorly selected c might result in the Class Character ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824686

52. On CD-AFM bias related to probe bending
Topic: Nanomanufacturing
Published: 4/9/2012
Authors: Vladimir A Ukraintsev, Ndubuisi George Orji, Theodore Vincent Vorburger, Ronald G Dixson, Joseph Fu, Richard M Silver
Abstract: Critical Dimension AFM (CD-AFM) is a widely used reference metrology. To characterize modern semiconductor devices, very small and flexible probes, often 15 nm to 20 nm in diameter, are now frequently used. Several recent publications have reported ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910903

53. Optical Flatness Metrology for 300 mm Silicon Wafers
Topic: Nanomanufacturing
Published: 4/1/2005
Authors: Ulf Griesmann, Quandou Wang, T D Raymond
Abstract: At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822272

54. Optical Through-Focus Technique that Differentiates Small Changes in Line Width, Line Height and Sidewall Angle for CD, Overlay, and Defect Metrology Applications
Topic: Nanomanufacturing
Published: 4/16/2008
Authors: Ravikiran Attota, Richard M Silver, Bryan M Barnes
Abstract: We present a new optical technique for dimensional analysis of sub 100 nm sized targets by analyzing through-focus images obtained using a conventional bright-field optical microscope.  We present a method to create through-focus image maps (TFIM) us ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824634

55. Optimization of Dispersion and Surface Pretreatment for Single GaN Nanowire Devices
Topic: Nanomanufacturing
Published: 9/28/2012
Authors: Norman A Sanford, Kristine A Bertness, Andrew M. Herrero
Abstract: The correlation of residual contamination with void formation at the contact/SiO2 interface for single GaN NW devices was investigated. The morphology at the metal/SiO2 interface was observed by removing the annealed Ni/Au films from the SiO2 with ca ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911627

56. Probe-Based Micro-Scale Manipulation and Assembly Using Force Feedback
Topic: Nanomanufacturing
Published: 6/26/2006
Authors: Jason John Gorman, Nicholas G Dagalakis
Abstract: Repeatable manipulation and assembly of micro-scale components is a critical capability for future developments in opto-electronics, hybrid microelectromechanical systems, and the integration of nano-scale devices into larger systems. This paper focu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822694

57. Quantum Dot Fluorescence Lifetime Engineering with DNA Origami Constructs
Topic: Nanomanufacturing
Published: 1/21/2013
Authors: James Alexander Liddle, Seung-Hyeon Ko, Kan Du
Abstract: The ability to organize nanostructures of disparate types and materials ‹ such as metal nanoparticles and semiconductor quantum dots ‹ is challenging but essential for the creation of novel materials and devices. Metal nanoparticles (NPs) have intere ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911962

58. Re-calibration of the NIST SRM 2059 Master Standard using Traceable Atomic Force Microscope Metrology
Topic: Nanomanufacturing
Published: 10/17/2008
Authors: Ronald G Dixson, James Edward Potzick, Ndubuisi George Orji
Abstract: The National Institute of Standards and Technology (NIST) has had a robust program in photomask dimensional metrology since the late 70s when the late Diana Nyyssonen and coworkers developed the first chrome-on-glass (COG) Standard Reference Materi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824724

59. Reducing Thermal Noise in Molecular Force Spectroscopy
Topic: Nanomanufacturing
Published: 6/2/2008
Author: Gordon Allan Shaw
Abstract: Molecular force spectroscopy is the practice of testing the mechanical properties of single molecules.  The precision determination of these properties requires an instrument capable of piconewton-level force measurement.  The atomic force ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824638

60. Review of Current Progress in Nanometrology with Helium Ions
Topic: Nanomanufacturing
Published: 9/19/2011
Authors: Michael T Postek, Andras Vladar, Bin Ming, Charles Archie
Abstract: Scanning electron microscopy has been employed as an imaging and measurement tool for more than 50 years and it continues as a primary tool in many research and manufacturing facilities across the world. A new challenger to this work is the helium ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905541



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