NIST logo

Publications Portal

You searched on: Topic Area: Nanomanufacturing Sorted by: title

Displaying records 11 to 20 of 37 records.
Resort by: Date / Title


11. Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features
Topic: Nanomanufacturing
Published: 3/26/2013
Authors: Yong Sik Kim, Nicholas G Dagalakis, Satyandra K. Gupta
Abstract: Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage is presented based on bulk mic ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913234

12. Dielectric characterization by microwave cavity perturbation corrected for non-uniform fields
Topic: Nanomanufacturing
Published: 7/23/2014
Authors: Nathan D Orloff, Jan Obrzut, Christian John Long, Thomas F. Lam, James C Booth, David R Novotny, James Alexander Liddle, Pavel Kabos
Abstract: The non-uniform fields that occur due to the slot in the cavity through which the sample is inserted and those due to the sample geometry itself decrease the accuracy of dielectric characterization by cavity perturbation at microwave frequencies. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=915011

13. Does Your SEM Really Tell the Truth? - How would you know? Part 1
Topic: Nanomanufacturing
Published: 12/16/2013
Authors: Michael T Postek, Andras Vladar
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many and diverse scientific and industrial applications. The high resolution of the SEM is especially suited for both qualitative and quantit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912761

14. Effects of wafer noise on the detection of 20 nm defects using optical volumetric inspection
Topic: Nanomanufacturing
Published: 2/11/2015
Authors: Bryan M Barnes, Francois R. Goasmat, Martin Y Sohn, Hui Zhou, Andras Vladar, Richard M Silver
Abstract: Patterning imperfections in semiconductor device fabrication may either be noncritical [e.g., line edge roughness (LER)] or critical, such as defects that impact manufacturing yield. As the sizes of the pitches and linewidths decrease in lithography, ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916347

15. Friction imprint effect in mechanically cleaved BaTiO3 (001)
Topic: Nanomanufacturing
Published: 9/28/2014
Authors: Christian John Long, Daniel Ebeling, Santiago D. Solares, Rachel J. Cannara
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=916209

16. Helium Ion Microscopy and its Application to Nanotechnology and Nanometrology
Topic: Nanomanufacturing
Published: 11/4/2008
Authors: Michael T Postek, Andras Vladar
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824682

17. High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
Topic: Nanomanufacturing
Published: 7/21/2008
Authors: Norman A Sanford, F Brizuela, Kristine A Bertness
Abstract: Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908697

18. High-voltage Nanoimprint Lithography of Refractory Metal Film
Topic: Nanomanufacturing
Published: 7/1/2010
Authors: John A Dagata, Natalia Farkas, R Ramsier
Abstract: Local oxidation of metal, semiconductor, and polymer surfaces has provided a common basis from which to explore fundamental principles of nanolithography and prototype functional nanostructures for many years now. This article summarizes an investiga ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=824748

19. Highly selective GaN-nanowire/TiO2-nanocluster hybrid sensors for detection of benzene and related environment pollutants
Topic: Nanomanufacturing
Published: 6/15/2011
Author: Norman A Sanford
Abstract: Nanowire‹nanocluster hybrid chemical sensors were realized by functionalizing gallium nitride (GaN) nanowires (NWs) with titanium dioxide (TiO2) nanoclusters for selectively sensing benzene and other related aromatic compounds. Hybrid sensor device ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909995

20. Integration, Interoperability, and Information Management: What are the Key Issues to Nanomanufacturing?
Topic: Nanomanufacturing
Published: 9/1/2007
Author: Kevin W Lyons
Abstract: Nanomanufacturing can be defined as all manufacturing activities that collectively support an approach to design, produce, control, modify, manipulate, and assemble nanometer scale objects and features for the purpose of fabricating a product or syst ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822744



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series