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Topic Area: Metrology

Displaying records 801 to 810 of 851 records.
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801. A Users' Guide to NIST SRM 2084: CMM Probe Performance Standards
Topic: Metrology
Published: 6/1/1994
Authors: Gregory W Caskey, Steven David Phillips, Bruce R. Borchardt, David E Ward, Daniel S Sawyer
Abstract: Standard Reference Materials (SRMs) as defined by the National Institute of Standards and Technology (NIST) are well-characterized materials, produced in quantity and certified for one or more physical or chemical properties. They are used to assure ...

802. A Monte Carlo Model for SEM Linewidth Metrology
Topic: Metrology
Published: 5/1/1994
Authors: J R. Lowney, Michael T Postek, Andras Vladar
Abstract: A scanning electron microscope (SEM) can be used to measure the dimensions of the microlithographic features of integrated circuits. However, without a good model of the electron-beam / specimen interaction, accurate edge location cannot be obtained. ...

803. An Instrument for Calibrating Atomic Force Microscope Standards
Topic: Metrology
Published: 5/1/1994
Authors: J Schneir, T Mcwaid, Theodore Vincent Vorburger
Abstract: To facilitate the use of AFMs for manufacturing we have initiated a project to develop and calibrate artifacts which can in turn be used to calibrate a commercial AFM so that subsequent AFM measurement are accurate and traceable back to the wavelengt ...

804. Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
Topic: Metrology
Published: 5/1/1994
Authors: Michael W Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E Clayton Teague
Abstract: This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature placement by a primary pattern generator. A new test structure has now been developed from th ...

805. Photoreflectance Study of the Chemically Modified (100) GaAs Surface
Topic: Metrology
Published: 5/1/1994
Authors: John A. Dagata, O Glembocki, J Tuchman, K Ko, S Pang
Abstract: Photoreflectance (PR) spectroscopy has been used to study the Fermi-level pinning position of chemically modified (100) GaAs surfaces. It is shown that there are two pinning positions for the unmodified (100) GaAs surface. For n-GaAs, the Fermi level ...

806. Application of the ASME/ANSI B89.1.12M Standard to an Articulating Arm Coordinate Measuring Machine
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5562(R)
Topic: Metrology
Published: 4/1/1994
Authors: Gregory W Caskey, Steven David Phillips, Bruce R. Borchardt, H Eaton, J Smith
Abstract: Abstract not available.

807. The Measurement of the Pile-up Topography of Hardness Indentations
Topic: Metrology
Published: 4/1/1994
Authors: L Blunt, P Sullivan
Abstract: A number of indentations were made in 70:30 brass specimens. The resulting surface disturbance was analyzed using a stylus-based 3D topography measuring instrument. Numerical methods based on progressive truncation routines were developed in order to ...

808. The Measurement and Uncertainty of a Calibration Standard for the SEM
Topic: Metrology
Published: 3/1/1994
Authors: Joseph Fu, M Croarkin, Theodore Vincent Vorburger
Abstract: Standard Reference Material 484 is an artifact for calibration the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000X to 20000X. Seven issues, SRM-484, and SRM-484a to SRM-484f, have been certified between 1977 and ...

809. Calibration of Translational Tables for use in 3-Dimensional Surface Topography Measurement Systems
Topic: Metrology
Published: 2/1/1994
Authors: E Mainsah, P Sullivan, K Stout
Abstract: Translational tables now form a vital pan in three-dimensional surface topography systems. In some systems typically. one translational table is used to provide measurements in one of the axes and the translational motion provided by the gearbox of t ...

810. The Effects of Quantization on 3D Topography Characterization
Topic: Metrology
Published: 2/1/1994
Authors: E Mainsah, P Sullivan, K Stout
Abstract: This paper investigates the influence of quantization on 3D surface characterization by carrying out an analysis of surface parameter changes on a range of real and simulated surfaces. The changes in parameters are calculated as a percentage of the o ...

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