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Topic Area: Metrology

Displaying records 771 to 780 of 851 records.
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771. Error Compensation for CMM Touch Trigger Probes
Topic: Metrology
Published: 1/1/1995
Authors: William Tyler Estler, Steven David Phillips, Bruce R. Borchardt, Ted Hopp, Christoph Johann Witzgall, M Levenson, et al
Abstract: We present the analysis of a simple mechanical model of a common type of kinematic seat touch trigger probe widely used on modem coordinate measuring machines (CMMs). The model provides a quantitative description of the pre-travel variation or probe ...

772. Fabrication of Optics by Diamond Turning
Topic: Metrology
Published: 1/1/1995
Authors: Richard L. Rhorer, Christopher J. Evans
Abstract: The use of special machine tools with single-crystal diamond-cutting tools to produce metal optics is called diamond turning. The manufacture of optical surfaces by diamond turning is relatively new compared to the traditional optical-polishing metho ...

773. Finishing Performance and Wear Mechanisms of Cubic Boron Nitride Tools in Turning Hardness 52100 Steels
Topic: Metrology
Published: 1/1/1995
Authors: Y K Chou, M Barash, Christopher J. Evans
Abstract: This study investigated the performance and wear behavior of different cubic boron nitride (CBN) tools in finish turning of hardened 52100 steels. Tool performance was evaluated based on surface finish and flank wear land width. Wear mechanisms of CB ...

774. Increasing the Value of Atomic Force Microscopy Process Metrology Using a High-Accuracy Scanner, Tip Characterization, and Morphological Image Analysis
Topic: Metrology
Published: 1/1/1995
Authors: J Schneir, John S Villarrubia, T Mcwaid, V W. Tsai, Ronald G Dixson
Abstract: Atomic force microscopes are being used increasingly for process metrology. As a case study, the measurement by atomic force microscope of a soda lime glass optical disk patterned using optical lithography and reactive plasma etching is examined. The ...

775. Interferometer Bandwidth Expanded by Software
Topic: Metrology
Published: 1/1/1995
Author: P Sullivan
Abstract: Abstract not available.

776. Measurement and Analysis of Forces in Grinding of Silicon Nitride
Topic: Metrology
Published: 1/1/1995
Authors: S Jahanmir, T W. Hwang, Eric Paul Whitenton, S Job, Christopher J. Evans
Abstract: Using an instrumented surface grinder, the two components of grinding forces (normal and tangential) were measured for different types of silicon nitride ceramics. The influences of grinding parameters, such as down feed and table speed, and grinding ...

777. Measurement of Patterned Film Linewidth for Interconnect Characterization
Topic: Metrology
Published: 1/1/1995
Authors: L Linholm, Robert Allen, Michael W Cresswell, Rathindra Ghoshtagore, S Mayo, H Schafft, John A Kramar
Abstract: The results from high-quality electrical and physical measurements on the same cross-bridge resistor test structure with approximately vertical sidewalls have shown differences in linewidth as great as 90 nm for selected conductive films. These diffe ...

778. Measuring Long Gage Blocks with the NIST Line Scale Interferometer
Series: Technical Note (NIST TN)
Report Number: 1410
Topic: Metrology
Published: 1/1/1995
Author: John S Beers
Abstract: An improved method for temporarily converting long gage blocks into line scales is described. The new process employs fused silica rather than previously used steel conversion gage blocks. Conversion blocks are pairs of small (13 mm) gage blocks with ...

779. Performance Evaluations
Topic: Metrology
Published: 1/1/1995
Author: Steven David Phillips
Abstract: The subject of coordinate measuring machine (CMM) evaluation is a broad an multifaceted one. The theme of this chapter is the evaluation of CMM measurement uncertainty which is central to the concept of traceability. This chapter elucidates the sourc ...

780. Pitch Diameter Measurement of Threaded Gages Using a CMM
Topic: Metrology
Published: 1/1/1995
Authors: Ralph C. Veale, Edgar G Erber, Bruce R. Borchardt
Abstract: The reference datum for a screw thread is the pitch diameter cylinder. Although a defined method within the United states for pitch diameter measurement exists, it does not follow worldwide procedures, and the complexity and uncertainties associated ...

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