NIST logo

Publications Portal

You searched on:
Topic Area: Semiconductors

Displaying records 131 to 140 of 144 records.
Resort by: Date / Title


131. Semiconductor Factory and Equipment Time Synchronization
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7088
Topic: Semiconductors
Published: 2/25/2004
Authors: YaShian Li-Baboud, Brad Van Eck
Abstract: With the advent of e-manufacturing including automated process control (APC), such as fault detection classification (FDC), more stringent accuracy requirements for time stamps are required to perform analysis intended for process and business critic ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31600

132. Raman and Magneto Transport Studies of MBE Grown B-FeSi2, B-(Fe1-xCrx)Si2, and B-(Fe1-xCox)Si2
Topic: Semiconductors
Published: 5/1/2002
Authors: A Srujana, A Wadhawan, K Srikala, R L Cottier, W Zhao, Christopher Littler, J M. Perez, T D Golding, Anthony Birdwell, W Henrion, M Rebien, P Stauss, R Glosser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906323

133. A Combinatorial Methodology to Discovering the Material Factors Controlling Resist Line Edge Roughness, Shape, and Critical Dimension
Topic: Semiconductors
Published: 1/28/2002
Authors: Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, Ronald Leland Jones, Eric K Lin, Christopher L Soles, Wen-Li Wu, D M Goldfarb, M Angelopoulos
Abstract: A combinatorial research methodology is discussed to determine the material factors that control line edge roughness (LER), shape, and critical dimension (CD) of developed photo-resist features. The approach involves generating a gradient of process ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852808

134. Reliability of Ultra-Thin Silicon Dioxide Under Substrate Hot-Electronic, Substrate Hot-Hole, and Tunneling Stress
Topic: Semiconductors
Published: 11/1/2001
Authors: Eric M. Vogel, Monica D Edelstein, John S Suehle
Abstract: Substrate hot-electron and substrate hot-hole injection experiments are used to provide insight into defect generation and breakdown of ultra-thin silicon dioxide under constant voltage tunneling stress. Results from substrate hot-electron injection ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=25004

135. Embedded Decoupling Capacitance Materials Characterization
Topic: Semiconductors
Published: 12/1/2000
Author: Jan Obrzut
Abstract: The dielectric constant of the embedded capacitance materials was measured in the frequency range from 100 Hz to 5 GHz. The testing included evaluation of the capacitance density, leakage current, and the effect of HAST on the capacitance. A test sp ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=851697

136. Micromachined Branch Line Coupler in CMOS Technology
Topic: Semiconductors
Published: 6/1/2000
Authors: Mehmet Ozgur, Ulas C. Kozat, Mona Elwakkad Zaghloul, Michael Gaitan
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906354

137. Charaterization of PFC Emissions from Semiconductor Process Tools
Topic: Semiconductors
Published: 9/1/1998
Authors: David S. Green, J. Meyers
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=903728

138. Interconnection Continuity Test for Packaged Functional Modules
Topic: Semiconductors
Published: 3/3/1998
Author: Jan Obrzut
Abstract: We developed an electrical test to evaluate interconnections in packaged, electrostatic-discharge (ESD) protected modules. The ESD protection circuit, which in modern integrated circuits is present at every I/O as an inherent part of the chip struct ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=854051

139. Building-In Reliability: Making It Work
Topic: Semiconductors
Published: 5/1/1991
Authors: Harry A. Schafft, D F Lee, P. E. Kennedy
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=6948

140. An Evaluation of Instrumental Correction Factors for Infrared Absorption Concentration Measurements,
Topic: Semiconductors
Published: 12/31/1989
Authors: D. Baghdadi, Erik M Secula
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=26303



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series