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Displaying records 61 to 70 of 215 records.
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61. Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism
Topic: Nanotechnology
Published: 4/30/2013
Authors: Mohammad Olfatnia, Siddharth Sood, Jason John Gorman, Shorya Awtar
Abstract: This paper reports in-plane electrostatic combdrive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. The C-DP-DP flexure mechanism design offers high b ...

62. Single laser pulse effects on suspended-Au-nanoparticle size distributions and morphology
Topic: Nanotechnology
Published: 4/30/2013
Authors: Richard E Cavicchi, Douglas C Meier, Cary Presser, Suvajyoti S. Guha
Abstract: Samples of suspended gold nanoparticles in the diameter range 10 nm to 100 nm were subjected to a single 7 ns pulse from a 532 nm laser to determine the effects of laser power on particle size distribution, mean size, and morphology. The experime ...

63. TSV Reveal height and bump dimension metrology by the TSOM method
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran Attota, Haesung Park, Victor Vartanian, Ndubuisi George Orji, Richard A Allen
Abstract: Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement meth ...

64. Use of TSOM for sub-11 nm node pattern defect detection and HAR features
Topic: Nanotechnology
Published: 4/30/2013
Authors: Ravikiran Attota, Abraham Arceo, Bunday Benjamin
Abstract: In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely ...

65. The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
Topic: Nanotechnology
Published: 3/29/2013
Authors: Liya Yu, Richard J Kasica, Robert Dennis Newby, Lei Chen, Vincent K Luciani
Abstract: This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of photol ...

66. Frontiers of Characterization and Metrology for Nanoelectronics: 2013
Topic: Nanotechnology
Published: 3/26/2013
Authors: Erik M Secula, David G Seiler

67. Discriminating the states of matter in metallic nanoparticle transformations: What are we missing?
Topic: Nanotechnology
Published: 2/20/2013
Authors: John M Pettibone, Julien C. Gigault, Vincent A Hackley
Abstract: A limiting factor in assessing the risk of current and emerging nanomaterials in biological and environmental systems is the ability to accurately detect and characterize their size, shape and composition in broad distributions and complex media. Asy ...

Topic: Nanotechnology
Published: 1/30/2013
Authors: Sujitra Jeanie Pookpanratana, Joseph William Robertson, Cherno Jaye, Daniel A Fischer, Curt A Richter, Christina Ann Hacker
Abstract: We have used Flip Chip Lamination (FCL) to form monolayer and bilayer molecular junctions of carboxylic acid-containing molecules with Cu atom incorporation. Carboxylic acid-terminated monolayers are self-assembled onto ultrasmooth Au using thiol che ...

69. Real-Time Size Discrimination and Elemental Analysis of Gold Nanoparticles using ES-DMA coupled to ICP-MS
Topic: Nanotechnology
Published: 1/22/2013
Authors: Sherrie R. Elzey, De-Hao D. Tsai, Lee Lijian Yu, Michael R Winchester, Michael E Kelley, Vincent A Hackley
Abstract: We report the development of a hyphenated instrument with the capacity to quantitatively characterize aqueous suspended gold nanoparticles (AuNPs) based on a combination of gas-phase size separation, particle counting, and elemental analysis. A custo ...

70. Standard Guide for Size Measurement of Nanoparticles Using Atomic Force Microscopy
Topic: Nanotechnology
Published: 1/1/2013
Authors: Vincent A Hackley, Frank W DelRio
Abstract: The purpose of this document is to provide guidance on the quantitative application of atomic force microscopy (AFM)to determine the size of nanoparticles2 deposited in dry form on flat substrates using height (z-displacement) measurement. Unlike ele ...

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