NIST logo

Publications Portal

You searched on:
Topic Area: Nanotechnology
Sorted by: date

Displaying records 21 to 30 of 392 records.
Resort by: Date / Title


21. Nanomanufacturing Concerns about Measurements made in the SEM II: Specimen Contamination
Topic: Nanotechnology
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar, Premsagar Purushotham Kavuri
Abstract: The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many and diverse scientific and industrial applications. The improvements that have been made have significantly improved the overall SEM per ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914028

22. Nanomanufacturing concerns about Measurements made in the SEM I: Imaging and its Measurement
Topic: Nanotechnology
Published: 11/1/2013
Authors: Michael T Postek, Andras Vladar
Abstract: The high resolution of the SEM is especially useful for qualitative and quantitative applications for both nanotechnology and nanomanufacturing. But, should users be concerned about the imaging and measurements made with this instrument? Perhaps one ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914029

23. Characterization of Airborne Nanoparticle Released from Consumer Products
Series: Technical Note (NIST TN)
Report Number: 1787
Topic: Nanotechnology
Published: 8/29/2013
Authors: Li Piin Sung, Joannie W Chin, Andrew Keith Persily
Abstract: This interim report summarizes research results to date under the FY2012 interagency agreement between CPSC and NIST to develop testing and measurement protocols for determining the quantities and properties of nanoparticles released from floorin ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913002

24. Temperature-Programmed Electrospray-Differential Mobility Analysis for Characterization of Ligated Nanoparticles in Complex Media
Topic: Nanotechnology
Published: 8/12/2013
Authors: De-Hao D. Tsai, Frank W DelRio, John M Pettibone, Pin Ann Lin, Jiaojie Tan, Michael Russel Zachariah, Vincent A Hackley
Abstract: In this study, an electrospray-differential mobility analyzer (ES-DMA) was operated with an aerosol flow-mode, temperature-programmed approach to enhance its ability to characterize the particle size distributions (PSDs) of nanoscale particles (NPs) ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913860

25. Through-focus scanning optical microscopy for defect inspection of EUV masks
Topic: Nanotechnology
Published: 8/12/2013
Authors: Ravikiran Attota, Vibhu Jindal
Abstract: The TSOM method provides three-dimensional nanoscale metrology using a conventional optical microscope. Substantial improvements in defect detectability using the TSOM method will be presented. The TSOM method shows potential to (i) detect phase defe ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914027

26. Production and Applications of Cellulose Nanomaterials
Topic: Nanotechnology
Published: 8/1/2013
Authors: Michael T Postek, Robert J Moon, Alan Rudie, Michael Bilodeau
Abstract: ,Production and Applications of Cellulosic NanomaterialsŠ was intended to help organize and highlight the wide range of research being conducted worldwide on the science and technology of cellulose nanomaterials. The format of this book consists of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914189

27. Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection
Topic: Nanotechnology
Published: 6/24/2013
Authors: Bryan M Barnes, Martin Y Sohn, Francois R. Goasmat, Hui H. Zhou, Richard M Silver, Abraham Arceo
Abstract: Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913510

28. Dimensional Metrology and Imaging of Cellulose Nanocrystals
Topic: Nanotechnology
Published: 6/14/2013
Authors: Michael T Postek, Andras Vladar
Abstract: Cellulose nanocrystals are one group of nanoparticles that have high potential economic value but, also present many basic research and manufacturing challenges. These challenges are not only in development of the fundamental processes needed for the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914004

29. Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node
Topic: Nanotechnology
Published: 6/7/2013
Authors: Ravikiran Attota, Benjamin D. Bunday, Victor Vertanian
Abstract: We present results using simulations and experiments to demonstrate metrological applications of the through-focus scanning optical microscopy (TSOM) down to features at and well below the International Technology Roadmap for Semiconductors' 22  ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913353

30. Preparation of Nanoscale TiO2 Dispersions in an Environmental Matrix for Eco-Toxicological Assessment
Series: Special Publication (NIST SP)
Report Number: 1200-5r1
Topic: Nanotechnology
Published: 6/3/2013
Authors: Julian S. Taurozzi, Vincent A Hackley, Mark R Wiesner
Abstract: Toxicity and fate assessment are key elements in the evaluation of the environmental, health and safety risks of engineered nanomaterials (ENMs). While significant effort and resources have been devoted to the toxicological evaluation of many ENMs, i ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913712



Search NIST-wide:


(Search abstract and keywords)


Last Name:
First Name:







Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series