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Author: Janet Cassard

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1. The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
Published: 3/27/2013
Authors: Janet M Cassard, Jon C Geist, Craig Dyer McGray, Richard A Allen, Muhammad Yaqub Afridi, Brian Joseph Nablo, Michael Gaitan, David G Seiler
Abstract: This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912229

2. User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
Series: Special Publication (NIST SP)
Report Number: 260-177
Published: 2/15/2013
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, Michael Gaitan, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910746

3. The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published: 3/21/2012
Authors: Janet M Cassard, Jon C Geist, Michael Gaitan, David G Seiler
Abstract: The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documen ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910317

4. User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition
Series: Special Publication (NIST SP)
Report Number: 260-179
Published: 9/6/2011
Authors: Janet M Cassard, Jon C Geist, Theodore Vincent Vorburger, David Thomas Read, David G Seiler
Abstract: The Microelectromechanical Systems (MEMS) 5-in-1 is a standard reference device sold as a NIST Standard Reference Material (SRM) that contains MEMS test structures on a test chip. The two SRM chips (2494 and 2495) provide for both dimensional an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=909186

5. Status of the MEMS Standardization Project at NIST: March 2011
Published: 3/28/2011
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908340

6. Status of the MEMS 5-in-1 Standard Reference Materials: November 2010
Published: 11/16/2010
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908342

7. Status of the MEMS Standardization Project at NIST: November 2010
Published: 11/8/2010
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=908341

8. MEMS Young's Modulus and Step Height Measurements with Round Robin Results
Published: 9/30/2010
Authors: Janet M Cassard, Richard A Allen, Craig Dyer McGray, Jon C Geist
Abstract: This paper presents the results of a microelectromechanical systems (MEMS) Young s modulus and step height round robin experiment, completed in April 2009, which compares Young s modulus and step height measurement results at a number of laboratories ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=904949

9. Status of the MEMS Standardization Project at NIST: July 2010
Published: 7/12/2010
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907029

10. Status of the MEMS Standardization Project at NIST: March 2010
Published: 3/29/2010
Author: Janet M Cassard
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=905451