Publications Portal

You searched on:
Author: robert vest
Sorted by: title

Displaying records 51 to 58.
Resort by: Date / Title

51. The Conversion of SURF II to SURF III,
Published: 1/1/1999
Authors: Mitchell L. Furst, R M Graves, A D Hamilton, L R Hughey, R P. Madden, Robert Edward Vest, W S Trzeciak, R A Bosch, L Greenler, P Robl, D Wahl
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101818

52. The New Ultraviolet Spectral Responsivity Scale Based on Cryogenic Radiometry at Synchrotron Ultraviolet Radiation Facility III
Published: 5/1/2001
Authors: Ping-Shine Shaw, Thomas C Larason, R Gupta, Steven W Brown, Robert Edward Vest, Keith R Lykke
Abstract: The recently completed upgrade of the Synchrotron Ultraviolet Radiation Facility (SURF III) at the National Institute of Standards and Technology (NIST) has improved the accuracy of radiometric measurements over a broad spectral range from the infrar ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841478

53. Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
Series: Journal of Research (NIST JRES)
Published: 7/1/2003
Authors: Charles S. Tarrio, S Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
Abstract: Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841623

54. Towards high accuracy reflectometry for extreme-ultraviolet lithography,
Published: 1/1/2003
Authors: Charles S. Tarrio, Steven Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101861

55. Update on NIST VUV transfer standard detector program
Published: 1/1/1993
Authors: L R Canfield, Robert Edward Vest, R P. Madden
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100149

56. Update on NIST VUV transfer standard detector program,
Published: 1/1/1993
Authors: L R Canfield, Robert Edward Vest, R P. Madden
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101816

57. World Wide Web Description of SURF II
Published: 1/1/1994
Author: Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100362

58. XUV Photometer System (XPS): Overview and Calibrations,
Published: 1/1/2005
Authors: T N Woods, G Rottman, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101803