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You searched on: Author: robert vest Sorted by: title

Displaying records 31 to 40 of 69 records.
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31. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...

32. Large Area Pt/n-GaN Schottky Photodiodes With Extremely Low Leakage Current
Published: 8/19/2004
Authors: A Shahid, Robert Edward Vest, D Franz, F Yan, Y Zhao, D B Mott
Abstract: Pt/n-type GaN Schottky photodiodes with very large active areas (0.25 cm^u2^d and 1 cm^u2^d) which exhibit extremely low leakage currents at low reverse bias are reported. The Schottky photodiodes were fabricated from n-/n+ epitaxial layers grown by ...

33. Large area GaN Schottky photodiode with low leakage current
Published: 1/1/2004
Authors: S Aslam, Robert Edward Vest, D Franz, F Yan, Y Zhao

34. Measuring Pulse Energy With Solid-State Photodiodes
Published: 4/10/2009
Authors: Robert Edward Vest, Shannon Bradley Hill, Steven E Grantham
Abstract: With the advent of extreme ultraviolet lithography (EUVL) the measurement of the energy contained in pulses of short-wavelength radiation is becoming increasingly important. Even low average power sources can deliver pulses of radiation with high pea ...

35. Metrology for EUV Lithography Sources and Tools
Published: 7/3/2006
Authors: Steven E Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto

36. Metrology for EUVL Sources and Tools,ed. by V. Bakshi
Published: 1/1/2006
Authors: S Grantham, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto

37. NIST Programs for Calibrations in the Far Ultraviolet Spectral Region
Published: 11/1/1999
Authors: Robert Edward Vest, L R Canfield, Mitchell L. Furst, R M Graves, A D Hamilton, L R Hughey, Thomas B Lucatorto, R P. Madden
Abstract: The National Institute of Standards and Technology (NIST) serves the growing ultraviolet user community by providing calibration services throughout the spectral range from 2 nm to 400 nm. In this paper we describe the far ultraviolet transfer standa ...

38. NIST VUV Metrology Programs to Support Space Based Research,
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw

39. NIST VUV metrology programs to support space-based research
Published: 1/1/2006
Authors: Robert Edward Vest, Yaniv Barad, Mitchell L. Furst, Steven E Grantham, Charles S Tarrio, Ping-Shine Shaw

40. Near UV Electroreflectance Facility
Published: 1/1/1997
Author: Robert Edward Vest

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