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Author: robert vest
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Displaying records 11 to 20 of 58 records.
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11. EUV component and system characterization at NIST for the support of extreme-ultraviolet lithography, ed. by R.S. Mackay
Published: 5/13/2005
Authors: S Grantham, Shannon Bradley Hill, Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto

12. Evaluation of Au/GaAsP and Au/GaP Schottky Photodiodes as Radiometric Detectors in the EUV, Proceedings of the Synchrotron Radiation Instrumentation, Argon National Laboratories, October 1995,
Published: 1/1/1996
Authors: Robert Edward Vest, L R Canfield

13. External Quantum Efficeincy of Pt/n-GaN Schottky Diodes in the Spectral Range 5-500 nm
Published: Date unknown
Authors: A Shahid, Robert Edward Vest, D Franz, F Yan, Y Zhao, Brent Mott

14. External efficiency of Pt/n-GaN Schottky diodes in the spectral range 5-500 nm
Published: 1/1/2005
Authors: S Aslam, Robert Edward Vest, D Franz, F Yan, Y Zhao, D B Mott

15. Extreme Ultraviolet Metrology at SURF III
Published: 1/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, S Grantham, Thomas B Lucatorto
Abstract: The last two decades have seen the development normal-incidence multiplayer mirrors and semiconductor photodiodes for extreme ultraviolet (EUV) radiation. Applications such as in astrophysics, lithography, and plasma physics, require precise calibra ...

16. Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings
Published: 7/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
Abstract: We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm^u-1^ and the other 2500 mm^u-1^. Measurements were made to provide absolute transmission efficiency ...

17. Extreme-Ultraviolet Metrology at SURF III,
Published: 1/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, Thomas B Lucatorto

18. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser

19. Facility for Pulsed Extreme Ultraviolet Detector Calibration
Published: Date unknown
Authors: Steven E Grantham, Robert Edward Vest, Charles S Tarrio, Thomas B Lucatorto
Abstract: All of the Extreme Ultraviolet light sources currently under consideration for Extreme Ultraviolet lithography are based on plasmas that emit radiation with a wavelength of approximately 13.4 nm. These sources whether they are produced by a discharg ...

20. First Solar EUV Irradiances Obtained from SOHO by the SEM,
Published: 1/1/1998
Authors: D L Judge, D R McMullin, H S Ogawa, D Hovestadt, B Klecker, M Hilchenbach, E M{omlat}bius, L R Canfield, Robert Edward Vest, R N. Watts, Charles S Tarrio, M K{umlat}hne

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