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1. Calibration procedure for UV-365 integrated irradiance measurements
George P Eppeldauer, Thomas C Larason, Robert Edward Vest, Uwe Arp, Howard W Yoon
Since the CIE standardized rectangular-shape spectral response function for the 320 nm to 400 nm wavelength range can be realized only with large spectral mismatch, the realized UV-A meters have different response functions resulting in large errors ...
2. IR-enhanced Si reference detectors for 1-step scale transfers from 300 nm to 1000 nm
George P Eppeldauer, Thomas C Larason, Jeanne M Houston, Robert Edward Vest, Uwe Arp, Howard W Yoon
IR-enhanced Si photodiodes have improved radiometric and electronic characteristics as compared to other widely used Si photodiodes and can be used as responsivity standards in the wavelength range from 300 nm to 1000 nm. Their low predicted uncerta ...
3. Noble Gas Excimer Scintillation Following Neutron Capture in Boron Thin Films
Alan K Thompson, Jacob McComb, Charles W Clark, Michael A. Coplan, Mohamad Al-Sheikhly, Robert Edward Vest
Far-ultraviolet (FUV) scintillation signals have been measured in heavy noble gases (argon, krypton, xenon) following boron-neutron capture (10B(n,α)7Li) in 10B thin films. The observed scintillation yields are comparable to the yields from some ...
4. Argon mini-arc mets its match: use of a laser-driven plasma source in ultraviolet-detector
Uwe Arp, Robert Edward Vest, Jeanne M Houston, Thomas B Lucatorto
The National Institute of Standards and Technology operates two Spectral Comparator Facilities,
which are used to provide detector calibrations from the ultraviolet to the near-infrared spectral
range. One of them, the Ultraviolet Spectral Compar ...
5. Constant pressure primary flow standard for gas flows from 0.01 cm^u3^/min to 100 cm^u3^/min (10^u-8^ mol/s to 10^u-5^ mol/s)
Robert F Berg, Gooding Timothy, Robert Edward Vest
We describe a flow meter for gas flows in the range from 0.01 sccm to 100 sccm with a relative standard uncertainty of 0.03 % at 1 sccm. (1 sccm ≈ 1 cm3/min of an ideal gas at 101325 Pa and 0 C ≈ 0.7 mol/s.) The flow meter calibrates a se ...
6. First Report on Quantum Dot Coated CMOS CID Arrays for the UV and VUV
Uwe Arp, Robert Edward Vest, Zoran Ninkov, Ross Robinson, Suraj Bhaskaran
A technique has been developed for coating commercial off the shelf (COTS) detector arrays with a thin, uniform layer of quantum dots. The quantum deposition is accomplished using an Optomec Aerosol Jet rapid prototyping system. When illuminated by U ...
7. EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection
Robert Edward Vest
The National Institute of Standards and Technology (NIST) operates the Synchrotron Ultraviolet
Radiation Facility (SURF III) to support a number of applications of extreme ultraviolet
radiation. SURF III is a 400 MeV electron storage ring that ca ...
8. SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research
Uwe Arp, Charles W Clark, Lu Deng, Nadir S. Faradzhev, Alex P. Farrell, Mitchell L. Furst, Steven E Grantham, Edward W Hagley, Shannon Bradley Hill, Thomas B Lucatorto, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
The calculability of synchrotron radiation (SR) makes electron storage rings wonderful light sources for radiometry. The broadband nature of SR allows coverage of the whole spectral region from the x-ray to the far-infrared. Compact low-energy storag ...
9. Far-ultraviolet signatures of the 3He(n,tp) reaction in noble gas mixtures
Patrick Hughes, Alan K Thompson, Michael Coplan, Robert Edward Vest, Charles W Clark
Previous work showed that the 3He(n,tp) reaction in a cell of 3He at atmospheric pressure generated tens of far-ultraviolet photons per reacted neutron. Here we report amplification of that signal by factors of 1000 and more when noble gases are adde ...
10. Tracking down sources of carbon contamination in EUVL exposure tools
Charles S Tarrio, Robert Edward Vest, Thomas B Lucatorto, R. Caudillo
Optics in EUVL exposure tools are known to suffer reflectivity degradation, mostly from the buildup of carbon. The sources of this carbon have been difficult to identify. Vacuum cleanliness is normally monitored with a residual gas analyzer, but th ...