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Author: robert vest

Displaying records 11 to 20 of 58 records.
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11. XUV Photometer System (XPS): Overview and Calibrations,
Published: 1/1/2005
Authors: T N Woods, G Rottman, Robert Edward Vest
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101803

12. Improved Radiometry For Extreme-Ultraviolet Lithography
Published: 11/1/2004
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, K Liu, Thomas B Lucatorto, Ping-Shine Shaw
Abstract: The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840173

13. Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings
Published: 7/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
Abstract: We report the results of transmission and diffraction measurements at EUV wavelengths (4-30 nm) for two gratings, one with a line density of 5000 mm^u-1^ and the other 2500 mm^u-1^. Measurements were made to provide absolute transmission efficiency ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840108

14. Extreme-ultraviolet radiation transmission and diffraction measurements of freestanding transmission gratings,
Published: 1/1/2004
Authors: D R McMullin, D L Judge, Charles S Tarrio, Robert Edward Vest, F Hanser
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101634

15. Large area GaN Schottky photodiode with low leakage current
Published: 1/1/2004
Authors: S Aslam, Robert Edward Vest, D Franz, F Yan, Y Zhao
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101427

16. 40 Years of Metrology With Synchrotron Radiation at SURF
Published: 9/1/2003
Authors: Uwe Arp, Steven E Grantham, Simon Grant Kaplan, Ping-Shine Shaw, Charles S Tarrio, Robert Edward Vest
Abstract: the advantages of a compact synchrotron radiation source like the Synchrotron Ultraviolet Radiation Facility for metrology in the ultraviolet and extreme ultraviolet are shown. The capabilities of the different experimental stations are explained an ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840164

17. Response of a Silicon Photodiode to Pulsed Radiation
Published: 9/1/2003
Authors: Robert Edward Vest, Steven E Grantham
Abstract: Both the integrated-charge and peak-voltage responsivity of a 1 cm2 Si photodiode optimized for the extreme ultraviolet have been measured with 532 nm wavelength pulsed radiation. The peak power of the optical pulse is varied from 35 mW to 24 kW wit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840152

18. Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
Series: Journal of Research (NIST JRES)
Published: 7/1/2003
Authors: Charles S Tarrio, S Grantham, M B Squires, Robert Edward Vest, Thomas B Lucatorto
Abstract: Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer EUV stepper mirrors require the highest attainable reflectivity a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841623

19. Present Status of Radiometric Quality Silicon Photodiodes
Published: 2/1/2003
Authors: R Korde, C Prince, N. Cunningham, Robert Edward Vest, E Gullikson
Abstract: Evaluation of five types of silicon photodiodes was undertaken to verify their suitability for absolute radiometry and also for their use as transfer standards in the spectral region from 1 nm to 1100 nm. Four types of photodiodes were fabricated for ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840128

20. Quantum Efficiency of Solar-Blind Semiconductor Photodiodes in the Far Ultraviolet
Published: 2/1/2003
Authors: Robert Edward Vest, B Hertog, P Chow
Abstract: A difficulty in diverse metrological applications is the measurement of relatively low intensity ultraviolet radiation in the presence of an intense visible radiation background. The development of a detector technology that combines the high efficie ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840129



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