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Displaying records 61 to 70 of 106 records.
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61. Extreme-Ultraviolet Metrology at SURF III,
Published: 1/1/2001
Authors: Charles S Tarrio, Robert Edward Vest, Steven E Grantham, Thomas B Lucatorto
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101762

62. Improvements to the NIST/DARPA EUV Reflectometry Facility
Published: 1/1/2001
Authors: Charles S Tarrio, Thomas B Lucatorto, S Grantham, M B. Squires, Uwe Arp, Lu Deng
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=100201

63. Selected Programs at the New SURF III Electron Storage Ring
Published: 6/1/2000
Authors: Mitchell L. Furst, Uwe Arp, G P Cauchon, A D Hamilton, L R Hughey, Thomas B Lucatorto, Charles S Tarrio
Abstract: The conversion of the electron storage ring at NIST (the National Institute of Standards and Technology) to SURF III (the Synchrotron Ultraviolet Radiation Facility) has resulted in a significant improvement to the azimuthal uniformity of magnetic fi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=841424

64. Tomography of Integrated Circuit Interconnect With an Electromigration Void
Published: 5/1/2000
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Y Wang, Uwe Arp, Thomas B Lucatorto, Bruce D Ravel, Charles S Tarrio
Abstract: An integrated circuit interconnect was subject to accelerated-life conditions to induce an electromigration void. The silicon substrate was removed, leaving only the interconnect encased test structure encased in silica. We imaged the sample wit ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840087

65. Microtomography of an integrated circuit interconnect with an electromigration void
Published: 1/1/2000
Authors: Zachary H Levine, A R Kalukin, M Kuhn, S P Frigo, I McNulty, C C Retsch, Ying-ju Wang, Uwe Arp, Thomas B Lucatorto, B D Ravel, Charles S Tarrio
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101604

66. Smoothing of Mirror Substrates by Thin-Film Deposition
Published: 9/8/1999
Authors: E Spiller, S Baker, E Parra, Charles S Tarrio
Abstract: Superpolished optical flats with high spatial frequency roughness below 0.1 nm have been commercially available for years. However, it is much more difficult to obtain figured optics of similar quality. We have obtained and tested the finish of fig ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840071

67. Methods to Remove Distortion Artifacts in Scanned Projections
Published: 7/1/1999
Authors: A R Kalukin, Zachary H Levine, Charles S Tarrio, S P Frigo, I McNulty, S S Wang, C C Retsch, M Kuhn, B Winn
Abstract: Atrifacts induced by distortions which sometimes occur in two-dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental atrifacts, and hence redu ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840077

68. Instrumental Aspects of X-Ray Microbeams in the Range Above 1 keV
Published: 4/1/1999
Authors: P Dhez, P Chevallier, Thomas B Lucatorto, Charles S Tarrio
Abstract: X rays were discovered by Roentgen in 1895, just over 100 years ago. Early investigations by Roentgen himself indicated that prisms, lenses, and mirrors were seemingly ineffective for deflecting and focusing x rays. However, the magical ability to ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840051

69. Instrumental Aspects of X-Ray Microbeams in the Range Above 1 KeV
Published: 1/1/1999
Authors: P Dhez, P Chevallier, Thomas B Lucatorto, Charles S Tarrio
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=101503

70. Optical Constants of In-Situ-Deposited Films of Important Extreme-Ultraviolet Multilayer Mirror Materials
Published: 7/1/1998
Authors: Charles S Tarrio, R N. Watts, Thomas B Lucatorto, J M Slaughter, Charles M Falco
Abstract: We have performed angle-dependent reflectance measurements of in-situ magnetron sputtered films of B^d4^C, C, Mo, Si, and W. The Fresnel relations were used to determine the complex index of refraction from the reflectance data in the region of appro ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=840047



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